Title:
EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR GENERATING EXTREME-ULTRAVIOLET LIGHT
Document Type and Number:
WIPO Patent Application WO/2011/102277
Kind Code:
A1
Abstract:
The disclosed extreme-ultraviolet light generation device may be provided with: a laser-beam-generating system; a laser control system that controls at least one of either the light intensity or the output timing of at least one laser beam output from the aforementioned laser-beam-generating system; a chamber to which at least one entrance is provided for introducing to the interior thereof the aforementioned at least one laser beam output from the aforementioned laser-beam-generating system; and a target supply unit that is provided to the aforementioned chamber and that supplies a target substance to a predetermined region within the aforementioned chamber. As a result, the CE of the extreme-ultraviolet light generation device is increased.
Inventors:
HORI TSUKASA (JP)
KAKIZAKI KOUJI (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
KAKIZAKI KOUJI (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2011/052767
Publication Date:
August 25, 2011
Filing Date:
February 09, 2011
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
HORI TSUKASA (JP)
KAKIZAKI KOUJI (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
HORI TSUKASA (JP)
KAKIZAKI KOUJI (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
International Classes:
H05G2/00
Foreign References:
| JP2010003548A | 2010-01-07 | |||
| JP2010021543A | 2010-01-28 | |||
| JP2009260019A | 2009-11-05 | |||
| JP2007033437A | 2007-02-08 | |||
| JP2008071547A | 2008-03-27 | |||
| JP2008277204A | 2008-11-13 | |||
| JP2008226462A | 2008-09-25 | |||
| JP2008293738A | 2008-12-04 | |||
| JP2009253032A | 2009-10-29 |
Other References:
See also references of EP 2538759A4
None
None
Attorney, Agent or Firm:
UTSUNOMIYA Masaaki et al. (JP)
Masaaki Utsunomiya (JP)
Masaaki Utsunomiya (JP)
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Claims: