Title:
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/229902
Kind Code:
A1
Abstract:
This extreme ultraviolet light source device comprises: a cathode; an anode; a power supply device; a first support structure that is metal and that supports the cathode; and a second support structure that is metal and that supports the anode. The power supply device causes an electrical discharge between the cathode and the anode to generate plasma that emits extreme ultraviolet light. The cathode is connected to a first rotational shaft that is metal, and the anode is connected to a second rotational shaft that is metal. The first support structure has a first support wall, and a first cylinder that surrounds the first rotational shaft. The second support structure has a second support wall, and a second cylinder that surrounds the second rotational shaft. The first support wall and the second support wall are stacked, one on top of the other. The first support wall has formed therein a through-hole into which the second cylinder is inserted, or the second support wall has formed therein a through-hole into which the first cylinder is inserted.
Inventors:
URAKAMI HIDEYUKI (JP)
MORIMOTO SHUNICHI (JP)
MORIMOTO SHUNICHI (JP)
Application Number:
PCT/JP2021/009330
Publication Date:
November 18, 2021
Filing Date:
March 09, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2007505460A | 2007-03-08 | |||
| JP2011507206A | 2011-03-03 | |||
| JP2008204940A | 2008-09-04 | |||
| JP2017103120A | 2017-06-08 |
Attorney, Agent or Firm:
KONISHI Kay et al. (JP)
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