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Title:
EXTREME UV LIGHT GENERATION DEVICE, EXTREME UV LIGHT GENERATION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/003517
Kind Code:
A1
Abstract:
An extreme UV light generation device according to one aspect of the present disclosure generates extreme UV light inside a chamber, the device comprising a piezo element provided inside the chamber, a pressure sensor that detects the pressure inside the chamber, a gas introduction unit that introduces gas into the chamber, an exhaust unit that exhausts the gas inside the chamber to the outside of the chamber, and a control unit that controls the voltage application to the piezo element. The control unit determines whether the voltage is applied to the piezo element on the basis of information about the pressure inside the chamber acquired by the pressure sensor.

Inventors:
HAYASHI KENGO (JP)
Application Number:
PCT/JP2018/024902
Publication Date:
January 02, 2020
Filing Date:
June 29, 2018
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01L41/04
Domestic Patent References:
WO2016175031A12016-11-03
Foreign References:
JP2012212655A2012-11-01
JPH01205581A1989-08-17
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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