Title:
EXTREME UV LIGHT GENERATOR
Document Type and Number:
WIPO Patent Application WO/2015/097888
Kind Code:
A1
Abstract:
To make it possible to recover a target efficiently. An extreme UV light generator, which may be provided with: a chamber in which extreme UV light is generated when a target is irradiated in the chamber with laser light; a target feed unit for feeding the target into the chamber; and a target recovery unit for receiving on a receiving surface the target that has been fed by the target feed unit but not irradiated with the laser light, and recovering the target into a recovery container, the receiving surface having a contact angle with respect to the target of 90° or less.
Inventors:
IWAMOTO FUMIO (JP)
NAKANO MASAKI (JP)
HORI TSUKASA (JP)
NAKANO MASAKI (JP)
HORI TSUKASA (JP)
Application Number:
PCT/JP2013/085184
Publication Date:
July 02, 2015
Filing Date:
December 27, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JP2011023712A | 2011-02-03 | |||
| JP2010171405A | 2010-08-05 | |||
| JP2008078031A | 2008-04-03 | |||
| JP2013004369A | 2013-01-07 | |||
| JP2000091095A | 2000-03-31 | |||
| JP2008226462A | 2008-09-25 | |||
| JP2010199560A | 2010-09-09 | |||
| JP2008277481A | 2008-11-13 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)
Patent business corporation エビス international patent firm (JP)
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