Title:
FABRICATING OPTICAL WAVEGUIDES
Document Type and Number:
WIPO Patent Application WO/2010/048222
Kind Code:
A3
Abstract:
Methods and devices are provided for fabricating waveguides. Some such methods involve forming at least a portion of the waveguide using an embossing process for shaping a substrate and/or other components. Some implementations provide processes for making waveguide features by omitting what may previously have been regarded as essential steps in forming waveguides via a semiconductor fabrication process. Some implementations provide processes of forming waveguide features by deliberately causing what would heretofore have been regarded as defects in a semiconductor fabrication process. Some such methods and devices can produce waveguides at a substantially lower cost than was heretofore possible.
Inventors:
CHUI CLARENCE (US)
Application Number:
PCT/US2009/061375
Publication Date:
August 26, 2010
Filing Date:
October 20, 2009
Export Citation:
Assignee:
QUALCOMM MEMS TECHNOLOGIES INC (US)
CHUI CLARENCE (US)
CHUI CLARENCE (US)
International Classes:
G02B6/122; B29C43/00; B29D11/00; G02B6/13
Domestic Patent References:
| WO2006066614A1 | 2006-06-29 |
Foreign References:
| US6144795A | 2000-11-07 | |||
| EP0813077A2 | 1997-12-17 | |||
| GB1372578A | 1974-10-30 | |||
| US20040234188A1 | 2004-11-25 | |||
| US20080223510A1 | 2008-09-18 |
Other References:
SUNG ET AL: "Fabrication of a polymeric photonic crystal wavelength splitter using ultra violet embossing technology", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 84, no. 5-8, 6 May 2007 (2007-05-06), pages 994 - 998, XP022061930, ISSN: 0167-9317
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