Title:
FABRICATION OF FILM BULK ACOUSTIC RESONATORS ON SILICON <110> WAFERS USING CRYSTAL-ORIENTATION-DEPENDENT ANISOTROPIC ETCHING
Document Type and Number:
WIPO Patent Application WO2004030208
Kind Code:
A3
Abstract:
A film bulk acoustic resonator formed on a substrate (710) includes a layer of piezoelectric material (735) having a first major surface, and a second major surface sandwiched between a first conductive (732) and a second conductive layer (736). The substrate on which the film bulk acoustic resonator is formed has an opening (750) therein which exposes the first conductive layer (732) of the film bulk acoustic resonator. The opening (750) is substantially in the shape of a parallelogram having a first pair of parallel sides (751, 752) and a second pair of parallel sides. One of the first pair of parallel sides makes an angle at other than 90 degrees with one of the second pair of parallel sides.
Inventors:
WANG LI-PENG
MA QING
YANKOVICH ISRAEL
BUTLER RICHARD
MA QING
YANKOVICH ISRAEL
BUTLER RICHARD
Application Number:
PCT/US2003/029532
Publication Date:
July 22, 2004
Filing Date:
September 17, 2003
Export Citation:
Assignee:
INTEL CORP (US)
International Classes:
H01L41/08; H01L41/18; H01L41/09; H01L41/22; H01L41/29; H01L41/332; H03H3/02; H03H9/02; H03H9/17; (IPC1-7): H03H3/02; H03H9/17
Foreign References:
| EP1073198A2 | 2001-01-31 | |||
| US5883012A | 1999-03-16 | |||
| US4348609A | 1982-09-07 | |||
| US4443293A | 1984-04-17 | |||
| DD288032A5 | 1991-03-14 | |||
| EP1306973A2 | 2003-05-02 |
Other References:
STOLLER A I: "THE ETCHING OF DEEP VERTICAL-WALLED PATTERNS IN SILICON", RCA REVIEW, RCA CORP. PRINCETON, US, June 1970 (1970-06-01), pages 271 - 274, XP009029751
LANG W: "Silicon microstructuring technology", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 17, no. 1, 1 September 1996 (1996-09-01), pages 1 - 55, XP004013096, ISSN: 0927-796X
KRISHNASWAMY S V ET AL: "Film bulk acoustic wave resonator and filter technology", MICROWAVE SYMPOSIUM DIGEST, 1992., IEEE MTT-S INTERNATIONAL ALBUQUERQUE, NM, USA 1-5 JUNE 1992, NEW YORK, NY, USA,IEEE, US, 1 June 1992 (1992-06-01), pages 153 - 155, XP010062874, ISBN: 0-7803-0611-2
LANG W: "Silicon microstructuring technology", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 17, no. 1, 1 September 1996 (1996-09-01), pages 1 - 55, XP004013096, ISSN: 0927-796X
KRISHNASWAMY S V ET AL: "Film bulk acoustic wave resonator and filter technology", MICROWAVE SYMPOSIUM DIGEST, 1992., IEEE MTT-S INTERNATIONAL ALBUQUERQUE, NM, USA 1-5 JUNE 1992, NEW YORK, NY, USA,IEEE, US, 1 June 1992 (1992-06-01), pages 153 - 155, XP010062874, ISBN: 0-7803-0611-2
Download PDF: