Title:
FABRICATION METHOD FOR THIN FILM SOLAR CELL WITH KESTERITE ABSORBER
Document Type and Number:
WIPO Patent Application WO/2012/055738
Kind Code:
A3
Abstract:
A method of fabricating a thin film solar cell includes the following steps. A molybdenum (Mo)-coated substrate is provided. Absorber layer constituent components, two of which are sulfur (S) and selenium (Se), are deposited on the Mo-coated substrate. The S and Se are deposited on the Mo-coated substrate using thermal evaporation in a vapor chamber. Controlled amounts of the S and Se are introduced into the vapor chamber to regulate a ratio of the S and Se provided for deposition. The constituent components are annealed to form an absorber layer on the Mo-coated substrate. A buffer layer is formed on the absorber layer. A transparent conductive electrode is formed on the buffer layer.
Inventors:
WANG KEJIA (US)
SHIN BYUNGHA (US)
BOJARCZUK NESTOR (US)
GUHA SUPRATIK (US)
SHIN BYUNGHA (US)
BOJARCZUK NESTOR (US)
GUHA SUPRATIK (US)
Application Number:
PCT/EP2011/068256
Publication Date:
March 28, 2013
Filing Date:
October 19, 2011
Export Citation:
Assignee:
IBM (US)
IBM UK (GB)
WANG KEJIA (US)
SHIN BYUNGHA (US)
BOJARCZUK NESTOR (US)
GUHA SUPRATIK (US)
IBM UK (GB)
WANG KEJIA (US)
SHIN BYUNGHA (US)
BOJARCZUK NESTOR (US)
GUHA SUPRATIK (US)
International Classes:
H01L31/18
Foreign References:
| US20080072962A1 | 2008-03-27 |
Other References:
ZARETSKAYA E. P. ET AL: "Structural And Optical Properties Of Cu(In,Ga)(S,Se)2 Absorber Layers Obtained By Two-Step Growth", PROCEEDINGS OF THE 21ST EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE HELD IN DRESDEN, GERMANY, 4 - 8 SEPTEMBER 2006, 4 September 2006 (2006-09-04), pages 1920 - 1923, XP040512613, ISBN: 978-3-936338-20-1
YAMAGUCHI T ET AL: "Characterization Of CuIn(S,Se)2 Thin Films Prepared By Thermal Crystallization From Cu-In-Se Precursor In S/Se Atmosphere", PROCEEDINGS OF THE 3RD WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, OSAKA INTERNATIONAL CONGRESS CENTER, 18 May 2003 (2003-05-18), pages 410 - 413Vol.1, XP031987594, ISBN: 978-4-9901816-0-4
TURCU M ET AL: "Composition dependence of defect energies and band alignments in the Cu(In1-xGax)(Se1-ySy)2 alloy system", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 91, no. 3, 1 February 2002 (2002-02-01), pages 1391 - 1399, XP012055648, ISSN: 0021-8979, DOI: 10.1063/1.1432126
KAWAMURA M ET AL: "Cu(In,Ga)Se2 thin-film solar cells grown with cracked selenium", JOURNAL OF CRYSTAL GROWTH, ELSEVIER, AMSTERDAM, NL, vol. 311, no. 3, 15 January 2009 (2009-01-15), pages 753 - 756, XP025947283, ISSN: 0022-0248, [retrieved on 20080930], DOI: 10.1016/J.JCRYSGRO.2008.09.091
BJÖRN-ARVID SCHUBERT ET AL: "Cu2ZnSnS4 thin film solar cells by fast coevaporation", PROGRESS IN PHOTOVOLTAICS: RESEARCH AND APPLICATIONS, vol. 19, no. 1, 31 May 2010 (2010-05-31), pages 93 - 96, XP055001284, ISSN: 1062-7995, DOI: 10.1002/pip.976
WANG K ET AL: "Thermally evaporated Cu2ZnSnS4 solar cells", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 97, no. 14, 5 October 2010 (2010-10-05), pages 143508-1 - 143508-3, XP012137203, ISSN: 0003-6951, DOI: 10.1063/1.3499284
YAMAGUCHI T ET AL: "Characterization Of CuIn(S,Se)2 Thin Films Prepared By Thermal Crystallization From Cu-In-Se Precursor In S/Se Atmosphere", PROCEEDINGS OF THE 3RD WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, OSAKA INTERNATIONAL CONGRESS CENTER, 18 May 2003 (2003-05-18), pages 410 - 413Vol.1, XP031987594, ISBN: 978-4-9901816-0-4
TURCU M ET AL: "Composition dependence of defect energies and band alignments in the Cu(In1-xGax)(Se1-ySy)2 alloy system", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 91, no. 3, 1 February 2002 (2002-02-01), pages 1391 - 1399, XP012055648, ISSN: 0021-8979, DOI: 10.1063/1.1432126
KAWAMURA M ET AL: "Cu(In,Ga)Se2 thin-film solar cells grown with cracked selenium", JOURNAL OF CRYSTAL GROWTH, ELSEVIER, AMSTERDAM, NL, vol. 311, no. 3, 15 January 2009 (2009-01-15), pages 753 - 756, XP025947283, ISSN: 0022-0248, [retrieved on 20080930], DOI: 10.1016/J.JCRYSGRO.2008.09.091
BJÖRN-ARVID SCHUBERT ET AL: "Cu2ZnSnS4 thin film solar cells by fast coevaporation", PROGRESS IN PHOTOVOLTAICS: RESEARCH AND APPLICATIONS, vol. 19, no. 1, 31 May 2010 (2010-05-31), pages 93 - 96, XP055001284, ISSN: 1062-7995, DOI: 10.1002/pip.976
WANG K ET AL: "Thermally evaporated Cu2ZnSnS4 solar cells", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 97, no. 14, 5 October 2010 (2010-10-05), pages 143508-1 - 143508-3, XP012137203, ISSN: 0003-6951, DOI: 10.1063/1.3499284
Attorney, Agent or Firm:
LITHERLAND, David, Peter (Intellectual Property LawHursley Park, Winchester Hampshire SO21 2JN, GB)
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