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Title:
FABRY-PEROT INTERFERENCE FILTER
Document Type and Number:
WIPO Patent Application WO/2015/002028
Kind Code:
A1
Abstract:
A Fabry-Perot interference filter (10A) is provided with: a first mirror (31); a second mirror (41) facing the first mirror (31) with a space (S) therebetween; a first electrode (17) that is formed on the first mirror (31) such that the first electrode surrounds a light transmitting region (11); a second electrode (18) that is formed on the first mirror (31) such that the second electrode includes the light transmitting region (11), and the second electrode is positioned on the inner side of the first electrode (17); a third electrode (19), which is formed on the second mirror (41) such that the third electrode faces the first electrode (17) and the second electrode (18), and which is connected to the second electrode (18) at a same potential; and wiring (22) that connects the second electrode (18) and the third electrode (19) to each other at the same potential. The first electrode (17) is provided with a first cutout section (17a) that extends from the inner side to the outer side of the first electrode (17), and the wiring (22) has a wiring section (22b), which passes the first cutout section (17a), and extends from the second electrode (18) to the outer side of the first electrode (17).

Inventors:
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
HIROSE MASAKI (JP)
KAWAI TOSHIMITSU (JP)
Application Number:
PCT/JP2014/066693
Publication Date:
January 08, 2015
Filing Date:
June 24, 2014
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; G01J3/26
Foreign References:
JPH07286809A1995-10-31
JP2013029641A2013-02-07
JP2012198268A2012-10-18
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
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