Title:
FAR INFRARED IMAGING DEVICE AND IMAGING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/014727
Kind Code:
A1
Abstract:
The disclosed far infrared imaging device irradiates far infrared light on a specimen, and detects an image of the specimen, and the disclosed device and method are capable of rapidly imaging a specimen without using a high-output light source and without causing damage or non-linear phenomena in the specimen which is to be imaged. Above a specimen, far infrared light is made to be a horizontally long shape or a shape wherein a plurality of dots are lined up in the horizontal length, and the specimen is illuminated; an image is detected whilst moving the specimen in a direction at a right-angle to the horizontal length direction of the far infrared light. Furthermore, the far infrared light is emitted by directing pulse shaped pump light from a femto second pulse light source to a far infrared light-emitting element (see figure 1).
Inventors:
SHIMURA Kei (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
志村啓 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
志村啓 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/066368
Publication Date:
February 02, 2012
Filing Date:
July 19, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHIMURA Kei (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHIMURA Kei (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
G01N21/35
Attorney, Agent or Firm:
HIRAKI Yusuke (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims:
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