R E LATE D A P P LI CATI O N S

[0001] This application claims priority to and all benefit of U.S. Patent

Application Serial No. 14/996,719, filed on January 15, 2016, for FAST HALL EFFECT MEASUREMENT SYSTEM, the entire disclosure of which is fully incorporated herein by reference.

TECHN ICAL FI ELD

[0002] The present invention relates generally to a method for measuring

materials properties, and more particularly to a method for measuring Hall effect voltage.

BAC KG RO U N D O F TH E I NVE NTI O N

[0003] When a magnetic field is applied perpendicular to a current flowing in a finite size semiconducting material, the combination of the current and magnetic field produces a Lorentz force on carriers within the semiconducting material. This force pushes the carriers into circular paths around the magnetic field lines. The carriers are constrained within the material, which creates an electric field perpendicular to both the current and the magnetic field. The voltage produced by this electric field is called the Hall effect voltage, or Hall voltage.

[0004] A steady state condition is reached when the force from the transverse electric field exactly cancels the Lorentz force. Accordingly, in this state the Hall voltage is proportional to the magnetic field and current, and depends inversely on the thickness of the material. The proportionality constant is called the Hall coefficient. The Hall coefficient and resistivity of the material can be related to the material properties carrier density and carrier mobility. The sign of the Hall voltage is the same as the sign of the charge of the carriers and thus provides a determination of carrier type (holes or electrons). [0005] In an ideal geometry, the measured Hall voltage is zero when the applied magnetic field is zero. The voltage measured in a practical experiment, however, is typically not zero, and includes a misalignment voltage and a thermal electric voltage. The misalignment voltage is proportional to the resistivity of the material, the current, and a factor that depends on the geometry. This factor converts resistivity to resistance between two Hall voltage probes. The thermal electric voltage arises from contacts between two different materials and is dependent on the thermal gradients present.

[0006] One method for measuring Hall effect involves application of a DC magnetic field to piece of material. In this method, the effects of the thermal electric voltage can be removed by changing the direction of the current applied across the material and measuring the voltage for both current directions. Thermal electric voltage does not depend on current. Thus, the effect of the thermal electric voltage is removed by subtracting the measured voltage at the two different currents.

[0007] Similarly, using a DC magnetic field, the misalignment voltage can be removed by changing the direction of the magnetic field and measuring the voltage for both field directions. Misalignment voltage does not depend on magnetic field. Thus, the effect of the misalignment voltage is removed by subtracting the measured voltage at the two different currents.

[0008] While the DC-field method may be advantageous for high-mobility materials, it often fails to provide accurate measurements for low- mobility materials, i.e., materials with a mobility less than 1 cm ² /Vs. In low-mobility materials, the difference between the voltage

measurements at each field direction becomes much smaller compared to the misalignment voltage. As a result, noise in the system can dominate the measurement and produce inaccurate results. Accordingly, Hall measurements using the DC-field method on low-mobility materials often give inconsistent values and carrier signs.

[0009] To increase the accuracy of measurements on low-mobility materials, larger magnetic fields are sometimes used, the reversal of which can take a long time, e.g., several minutes, depending on a magnet's configuration. During the time it takes to reverse the DC field, the temperature of the measured material may change. A change in temperature will cause a change in the misalignment voltage between measurements, leading to an incorrect result when the two

measurements are subtracted.

[0010] Another method of measuring Hall effect uses an AC magnetic field.

Because the misalignment voltage is not dependent on the magnetic field, it will remain a DC voltage while the Hall voltage is an AC voltage. A DC current is still used in this method, meaning that the thermal electric voltage also remains a DC voltage. A lock-in amplifier can then be used to easily separate the AC and DC voltages and thus the misalignment voltage from the Hall voltage.

[0011] The AC-field method solves some of the problems inherent in the DC- field method. Particularly, the separation of voltages in frequency space allows for much easier detection of smaller voltage differences, for example when measuring low-mobility carriers.

[0012] The AC-field method, however, suffers from a large drawback: in actual use it can be slow. The speed is determined by the frequency of the magnetic field. For real magnets and power supplies, the highest operating frequency can be approximately 0.1 Hz (10 seconds per cycle), as determined by the inductance of the magnet. Typically, a lock- in amplifier uses 6 cycles of input for best averaging of the output signal. Thus, a single Hall voltage measurement may take 60 seconds. Further, adding current reversal, which is required to remove the thermal electric voltages and phase errors, a total of 6 measurements are required, making the time to measure a Hall voltage 6 minutes. In practice, this Hall measurement is repeated from 10 to 100 times to get average values and an estimation of statistical variations. In sum, full measurement of a single material can take up to 10 hours under this method.

[0013] If the carrier density of a material is large, the Hall voltage will be small.

To measure such materials, increasing the current will increase the Hall voltage. However, when the current is increased, self-heating can cause the temperature of the material to change. Specifically, the sample and contacts will have some resistance and power will be dissipated in the sample. This power will heat up the sample. The misalignment voltage is proportional to the resistivity of the material. As the temperature of the sample changes, the resistance changes and hence the misalignment voltage changes. In effect, a term that was a DC signal becomes a time dependent signal that will be detected by the lock-in amplifier in addition to the Hall voltage. The slowly-changing misalignment voltage will look like noise in the measurement. Additional noise comes from the Johnson-Nyquist noise due to material resistance. These two noise contributions to the measurements limit the ability of the AC field Hall method to measure small Hall voltages.

[0014] Accordingly, a system and method is needed for more quickly and

accurately measuring Hall voltages, particularly for low-mobility materials.

S U M M A RY

[0015] Embodiments of the present invention comprise systems and methods of measuring the Hall effect voltage of a material. In one embodiment, a first test state is provided alternating a first test parameter at a first frequency. A second test state is provided alternating a second test parameter at a second frequency. The first test parameter is one of a test excitation, a location of the test excitation, a direction of a magnetic field and a location of the magnetic field, and the second test parameter is another of the test excitation, the location of the test excitation, the direction of a magnetic field and the location of the magnetic field.

[0016] According to another embodiment, a system for measuring the Hall effect voltage of a material includes a magnet, test excitation mechanism, a voltage measuring device and a control configured to provide a first test state alternating a first test parameter at a first frequency and a second test state alternating a second test parameter at a second frequency. The first test parameter is one of a test excitation, a location of the test excitation, a direction of a magnetic field and a location of the magnetic field, and the second test parameter is another of the test excitation, the location of the test excitation, the direction of a magnetic field or the location of the magnetic field.

[0017] Further limitations and disadvantages of conventional, traditional, and proposed approaches will become apparent to one of skill in the art, through comparison of such approaches with embodiments of the present invention as set forth in the remainder of the present application with reference to the drawings.

B R I E F D E SC R I PT I O N O F TH E D RAW I N G S

[0018] These and other features and advantages of the present invention will become better understood with regard to the following description and accompanying drawings in which:

[0019] Figures la-lh are exemplary schematic diagrams of several different states of a Hall measurement device according to the present invention;

[0020] Figure 2 is a signal output from a first exemplary Hall measurement device for a high-mobility material;

[0021] Figure 3 is a signal output from the first exemplary Hall measurement device for a low-mobility material;

[0022] Figure 4 is a signal output from a second exemplary Hall measurement device for a low-mobility material according to the present invention;

[0023] Figure 5 is the signal output of Figure 4 after exemplary conditioning according to the present invention;

[0024] Figure 6 is a flow chart illustrating a method of measuring a Hall voltage according to the present invention;

[0025] Figure 7 is an exemplary system for measuring a Hall voltage according to the present invention.

[0026] Figures 8a and 8b are schematic diagrams of exemplary material shapes measured by a Hall sensing device according to the present invention.

D ETA I L E D D ESC R I PT I O N

[0027] Figures la-lh illustrate several states of two exemplary systems for detecting Hall voltage in an exemplary piece of material 100. Generally, for a given piece of material, when a current I and magnetic field B are perpendicularly applied to the material, theoretically, a resulting Hall voltage VH dependent on the material's Hall factor R _H , can be measured perpendicular to the plane created by the current and magnetic field. Reference axes 101 and 103 illustrate the physical relationship between these elements in two different configurations. As described above, the actual measured voltage V _m , however, includes other voltage

components. Specifically, a misalignment voltage may appear based on the resistivity p, and geometrical factor a of the piece of

ceo

material (V _ma = Further , the measurement may include a thermal-electric voltage V _te . With those components added, the measured voltage should be equal to:

[0028] The exemplary piece of material 100 of Figures la- Id is substantially square in shape, though as explained more fully herein, other shapes may be used. The piece of material 100 includes four contact points, 102, 104, 106 and 108, arranged around outer edges of the material 100, creating two pairs of generally opposite contact points. The piece of material may be any material for which Hall measurement is desired. Generally the thickness of the material may be any size but for practical measurements the thickness should be less than 2 mm. Smaller thickness will increase the Hall voltage, but will also increase the misalignment voltage. A current flow 1 110 runs in the direction indicated by the arrow. A magnetic field B (not shown except in axes 101) is directed perpendicular to the surface area of the piece of material 100.

[0029] Figure la illustrates a first measuring state 120. In state 120, the current 1 110 runs from contact point 106, through the material 100, to contact point 102. A first voltage V _m 130 is measured across contact points 104 and 108 and may be defined as follows:

R _H B ap

ν _ηι = Ι -^- + Ι + ν _ίβι

[0030] Figure lb illustrates a second measuring state 122. In state 122, the same current 1 110 now runs from contact point 108, through the material 100, to contact point 104 and a second voltage V _m 132 is measured across contact points 106 and 102. The Onsager relationship and H. H. Sample (Sample, H. H. and Bruno, W. J. and Sample, S. B. and Sichel, E. K., Journal of Applied Physics, 61, 1079-1084 (1987)) teaches us that the change in position of the current flow 1 110 relative to the magnetic field B causes the above equation for V _m to change such that B is replaced with -B. Also, because the voltage leads are on different contact points, the thermal voltage t^will be different, leading to the following equation:

R _H B ap

ν _η2 = -Ι -^- + Ι + ν _ίβ2

[0031] Figure lc illustrates a third measuring state 124. In state 124, the same current 1 110 now runs from contact point 102, through the material 100, to contact point 106 and a third voltage V _m3 134 is measured across contact points 104 and 108. The reversal of current flow 1 110 relative to the first state 120 will cause the current 1 110 to be negative in the equation, but because the same contact points are used, the thermal electric voltage will be the same V _te as in state 120. The following equation defines state 124:

[0032] Figure Id illustrates a fourth measuring state 126. In state 126, the same current 1 110 now runs from contact point 104, through the material 100, to contact point 108 and a fourth voltage V _m 136 is measured across contact points 102 and 106. The reversal of current flow 1 110 relative to the second state 122 will again cause the current 1 110 to be negative in the equation, but because the same contact points are used, the thermal electric voltage will be the same V _te as in that state. Also, like state 122, the change in position of the current flow I 110 relative to the magnetic field B causes the equation to change such that B is replaced with -B:

R _H B ap

Vm ₄ = I -^- - I - + V _te2

[0033] The Hall voltage for the piece of material 100 can then be calculated from the above equations as V _m — V _m2 — V _m3 + V _m , which will remove the misalignment and thermal-electric voltages from the equation Switching between states 120, 122, 124 and 126 requires only switching contact points for voltage measurement and current flow. Because no field reversal is necessary, the time for polarity reversal of large magnets is no longer an issue. [0034] It will be appreciated by one of ordinary skill in the art, as seen in the above equations, that the Hall coefficient and related properties of a material can be determined by application of a current and measurement of a resulting voltage or by application of a voltage to generate a current and measurement of a resulting voltage. Figures le-lh illustrate this alternate embodiment wherein a specific voltage 142a, 144a, 146a andl48a is applied with resulting currents 142b, 144b, 146b and 148b generated, and resulting voltages V _m 140 are measured . Whichever method of excitation is used on the material (i.e., current or voltage), it is still possible to use the above equations, after measuring currents with present method or system, to determine Hall effect properties. However, in either embodiment, alternating the magnetic field B instead of current 1 110 can be used to create states with similar results.

[0035] The above method, however, may still fail to accurately measure Hall voltage in low-mobility carriers with high misalignment voltage. When the above states are repeated in order, Hall voltage and misalignment voltage will change at the same frequency, but with a phase shift between the two. In materials with normal or high carrier mobility, the misalignment voltage is the same order of magnitude or smaller than the Hall voltage. Thus, the separation in phase space is sufficient to get a measurement of Hall voltage without contribution from the

misalignment voltage. An exemplary voltage measurement for a high- mobility carrier is shown in Figure 2. The misalignment voltage, seen as the change in amplitude at point 200 and similar points of the signal, is easily separable from the Hall voltage, which is seen as the large change in amplitude at 202 and similar points.

[0036] For low-mobility materials, however, the misalignment voltage is

typically very large compared to the Hall voltage. Accordingly, it may be difficult, if not impossible, to separate the Hall voltage from the misalignment voltage, as both occur at the same frequency. An exemplary voltage measurement is shown in Figure 3. As can be seen, the misalignment voltage, seen as the change in amplitude at point 300 and similar points of the signal, dominates the square wave. By contrast, the Hall voltage, the tiny change in amplitude at 302 and similar points, will be very difficult to measure. [0037] The above problem in measuring Hall voltage for low-mobility carriers can be overcome by modifying the above method to vary the frequency between the misalignment voltage and Hall voltage. Returning briefly to Figures la- Id, the misalignment voltage, which does not depend on the magnetic field, remains constant between states 120 and 122 and between states 124 and 126, while at the same time the Hall Voltage, which does depend on the magnetic field, reverses sign. Thus, nonsequential switching techniques create different frequencies between the misalignment voltage and Hall voltage. For example, by switching between states 122 and 124 for a certain number of cycles, and then switching between states 124 and 126 for a certain number of cycles, rather than simply measuring each state for a single cycle in order, the Hall voltage and misalignment voltage are set to differing frequencies.

[0038] Figure 4 shows an exemplary voltage measurement technique using an exemplary switching pattern as described above. While this

misalignment voltage 400 is still very large compared to the Hall voltage 402, the Hall voltage 402 is now toggled at a different frequency than the misalignment voltage 400. A demodulation may then be used, for example a double demodulation, on the signal to separate out the Hall voltage, followed by an amplifier, e.g., an AC-coupled amplifier, to measure the Hall voltage. An amplified version of the demodulated Hall voltage from Figure 4 is shown in Figure 5. As can be seen, the Hall voltage is now easily measurable.

[0039] As will be described below in further detail, the different measurements are more easily discernible from the voltage measurement of Figure 4. For example, the switching between first and seconds states occurs over the period 410 (or n cycles as used below) and the switching between third and fourth states occurs over the period 412 (or m cycles as used below). The entire period of the measurement 414 corresponds to the total number of cycles (p, as used below) for the measurement.

[0040] The above described method for measuring Hall voltage of a material is more clearly illustrated in the flow chart of Figure 6. At step 610, voltage is measured in a first state, with a current flowing in a first direction across the material and a voltage signal measured across a perpendicular direction. At step 620, voltage is measured in a second state where the current is switched to flow perpendicular to its previous direction and the voltage signal is measured perpendicular to the new current direction. Steps 610 and 620 are repeated n times at step 630 before moving to step 640. The repetition count n may be any number of times, for example in the range of 1-10 times, but may be greater.

[0041] At step 640, the current is switched to flow in the opposite direction as in step 610, with the voltage signal again measured in this third state across a perpendicular direction. At step 650, voltage is measured in a fourth state where the current is switched to flow perpendicular to its previous direction and opposite the current of step 620. The voltage signal is measured perpendicular to the new current direction. Steps 640 and 650 are repeated m times at step 660. The repetition count m may be any number of times, for example in the range of 1-10 times, but may be greater. The method then returns to step 610 and steps 610-660 are repeated as described above p times at step 670, until the desired quantity of measurement has been completed. The repetition count p may be any number of times, for example in the range of 1-10 times, but may be greater.

[0042] Referring briefly back to Figures la-lh, exemplary corresponding states are shown. For example, using the above-described pattern, a measurement can toggle between states 120 and 122 n times, then toggle between states 124 and 126 m times, repeating the process for a total of p times.

[0043] Using the above technique, many toggling patterns are possible. For example, n and m may be equal, resulting in two frequencies, one each for Hall voltage and misalignment voltage, or n and m may be different, creating two frequencies each for the two voltages. In some cases of n and m, the totality of measurements p may not be much larger than each of the individual sets of cycles n and m, and in other cases p may be much larger than n and m, providing for a larger measurement sample. In all cases, the individual measurements at each state are recorded in time to create a continuous voltage-measurement signal.

[0044] Returning to Figure 6, once the desired quantity of measurements at steps 610-660 have been completed at step 670, the method moves to step 680 where the measured signal is demodulated, e.g., by double demodulation. Finally, at step 690, the demodulated signal is amplified, e.g., by AC-coupled amplification.

[0045] It should be understood that there are many ways to achieve frequency separation between the Hall voltage and misalignment voltage according to the present invention. For example, Figure 6 shows steps 610 and 620 being repeated n times. The number of repeated cycles n can be any number sufficient to effectuate practical demodulation. Moreover, while Figure 6 shows steps 640 and 650 being repeated a different number of times, i.e., m times, it is contemplated that the number of cycles repeated between steps 640 and 650 may be the same as the number of cycles repeated between steps 610 and 620, i.e., n times.

[0046] Figure 7 shows a schematic diagram of an exemplary system 700

according to the present invention used to measure the Hall voltage of a piece of material 702. The system 700 includes a magnet 704 for creating a magnetic field. The magnet 704 can be any suitable magnet, with the understanding that more powerful magnets may be necessary to induce a measurable Hall voltage in heavily doped materials. For example, magnets capable of generating a 1 T or greater field, and for some applications, superconducting magnets of 9 T or greater may be necessary. For the exemplary system of figure 7, typical values for the n cycle times would be 0.5 to 5 seconds and typical values for the m cycle times would also be 0.5 to 5 seconds, though other values are contemplated, such as, but not limited to, .5 seconds each for n and m cycle times, 1 second each for m and n cycle times, 5 seconds each for n and m cycle times or .5 seconds for n cycle times and 1.5 seconds for m cycle times.. The value of n and m for these cycle times might be on the order of 100. This provides a high quality Hall voltage measurement in 10 seconds or less. This time should be compared to the approximately 1 hour that a similar-quality Hall measurement using the AC field method would require. This is a factor of over 300 improvement in the measurement time of the sample.

[0047] The exemplary system 700 also includes current source 706, which can be any standard DC current source, [for example Keithley 6220]. The system 700 further includes a voltage-measuring device 708 capable of measuring a voltage signal, [such as Signal Recovery 7230 lock in amplifiers]. [0048] The current source 706 and voltage-measuring device 708 are connected to a controller 710. The controller 710 may be, for example, an array of switches. The controller 710 is in turn connected to four contact points, 720, 722, 724, and 726 of material 702. The controller 710 is configured to change which of the contact points 720, 722, 724, and 726 are connected to the current source 706 and which are connected to the voltage measuring device 708 at any given time, facilitating fast switching of the states of the above-described methods.

[0049] The method described herein uses a current source as the excitation for the measurement. Another embodiment may use a voltage source (such as a Keysight B2987A electrometer) and a current meter (such as a Keithley 6485) to measure the current produced by the voltage source. These instruments would replace the current source 706 in figure 7.

[0050] Figures 8a and 8b depict two exemplary shapes for a piece of material measured according to the present invention. One of ordinary skill in the art would understand that other shapes are possible, given that geometries of material and the location of the contact points during measurement will have significant effects on the measurement result. Figure 8a, for example, depicts a piece of material in a hall bar shape having contact points 802, 804, 806, and 808. Figure 8b depicts a piece of material in a Greek cross shape, having contact points 812, 814, 816, and 818.

[0051] While the present invention has been illustrated by the description of embodiments thereof, and while the embodiments have been described in considerable detail, it is not the intention of the applicants to restrict or in any way limit the scope of the appended claims to such detail. Additional advantages and modifications will readily appear to those skilled in the art. Moreover, elements described with one embodiment may be readily adapted for use with other embodiments. Therefore, the invention, in its broader aspects, is not limited to the specific details, the representative apparatus, and illustrative examples shown and described. Accordingly, departures may be made from such details without departing from the spirit or scope of the general inventive concepts.