Title:
FEEDSTOCK SUPPLY UNIT AND VAPOR DEPOSITION EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2007/072867
Kind Code:
A1
Abstract:
A feedstock supply unit for evaporating or sublimating feedstock and supplying
the resulting vapor to a treatment vessel in vapor deposition equipment, which
is equipped with a feedstock vessel for holding the feedstock, a gas introduction
port for supplying a carrier gas to the inside of the feedstock vessel, and a gas
discharge port for discharging the evaporated or sublimated feedstock together
with the carrier gas in order to supply them to the treatment vessel, characterized
in that the feedstock vessel is provided with a gas flow controller for controlling
the flow of the carrier gas in the inside thereof.
Inventors:
INOUE MASAJI (JP)
NOZAWA TOSHIHISA (JP)
NOZAWA TOSHIHISA (JP)
Application Number:
PCT/JP2006/325392
Publication Date:
June 28, 2007
Filing Date:
December 20, 2006
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
INOUE MASAJI (JP)
NOZAWA TOSHIHISA (JP)
INOUE MASAJI (JP)
NOZAWA TOSHIHISA (JP)
International Classes:
C23C16/448; C23C14/24; H05B33/10
Foreign References:
| JPS63195270A | 1988-08-12 | |||
| JP2001059178A | 2001-03-06 | |||
| JPH06232048A | 1994-08-19 |
Attorney, Agent or Firm:
ITOH, Tadahiko (Yebisu Garden Place Tower 20-3, Ebisu 4-Chome, Shibuya-K, Tokyo 32, JP)
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