Title:
FERROELECTRIC CERAMIC AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2017/002738
Kind Code:
A1
Abstract:
The objective of the present invention is to improve piezoelectric characteristics. One embodiment of the present invention is a method for producing a ferroelectric ceramic, wherein: a first amorphous film is formed on a substrate; a Pb(Zr1-x-zTixNbz)O3 film 105 is formed on the substrate by crystallizing the first amorphous film by means of a heat treatment at a first temperature in an oxygen atmosphere; a second amorphous film is formed on the Pb(Zr1-x-zTixNbz)O3 film; and a Pb(Zr1-y-zTiyNbz)O3 film 107 is formed on the Pb(Zr1-x-zTixNbz)O3 film by crystallizing the second amorphous film by means of a heat treatment at a second temperature, which is higher than the first temperature, in an oxygen atmosphere; with x, y, and z satisfying formulae 1-3 and formula 11 below. 0.24 < x ≤ 0.45 formula 1 0.45 ≤ y < 0.76 formula 2 x + 0.05 < y formula 3 0 ≤ z ≤ 0.03 formula 11
Inventors:
KIJIMA TAKESHI (JP)
SHIGENAI TAKEKAZU (JP)
SHIGENAI TAKEKAZU (JP)
Application Number:
PCT/JP2016/068935
Publication Date:
January 05, 2017
Filing Date:
June 20, 2016
Export Citation:
Assignee:
YOUTEC CO LTD (JP)
International Classes:
H01L41/43; C23C14/08; H01L41/187; H01L41/316; H01L41/317
Foreign References:
| JP2008210924A | 2008-09-11 | |||
| JP2008066623A | 2008-03-21 | |||
| JP2004152922A | 2004-05-27 | |||
| JP2015099848A | 2015-05-28 |
Attorney, Agent or Firm:
YANASE, Mutsuyasu et al. (JP)
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