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Title:
FERROELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/132636
Kind Code:
A1
Abstract:
Disclosed is a ferroelectric device comprising: a lower electrode (first electrode) (14a) formed on one surface side of a silicon substrate (first substrate) (10); a ferroelectric film (14b) formed on the lower electrode (14a) on the opposite side to the first substrate (10) side; and an upper electrode (second electrode) (14c) formed on the ferroelectric film (14b) on the opposite side to the lower electrode (14a). The ferroelectric film (14b) is formed from a ferroelectric material with a lattice constant difference from silicon. A shock absorbing layer (14d) made from a material with better lattice matching with the ferroelectric layer (14b) than silicon is provided directly below the lower electrode (14a), and a cavity (10a) that exposes a surface of the shock absorbing layer (14d) opposite to the lower electrode (14a) side is formed in the first substrate (10).

Inventors:
OGAWA, Junya (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
小川 純矢 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
YAMAUCHI, Norihiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
山内 規裕 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
Application Number:
JP2011/059521
Publication Date:
October 27, 2011
Filing Date:
April 18, 2011
Export Citation:
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Assignee:
PANASONIC ELECTRIC WORKS CO., LTD. (1048, Oaza-Kadoma Kadoma-sh, Osaka 86, 〒5718686, JP)
パナソニック電工株式会社 (〒86 大阪府門真市大字門真1048番地 Osaka, 〒5718686, JP)
OGAWA, Junya (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
小川 純矢 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
YAMAUCHI, Norihiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
International Classes:
H01L41/113; B81B7/02; G01J1/02; G01P15/09; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/23; H01L41/319; H01L41/39; H02N2/18
Foreign References:
JPH08167740A1996-06-25
JP2002214038A2002-07-31
JP2008232896A2008-10-02
JP2009201101A2009-09-03
JP2004006722A2004-01-08
JP2011029274A2011-02-10
JP2011071467A2011-04-07
JP2011091318A2011-05-06
JP2011091319A2011-05-06
JPH08321640A1996-12-03
Other References:
KAZUMASA SHIBATA ET AL.: "Micro electric power generation using a piezoelectric thin film", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS IIP2008 CONFERENCE ON INFORMATION, INTELLIGENCE AND PRECISION EQUIPMENT, 17 March 2008 (2008-03-17), pages 232 - 233
B.S.LEE ET AL.: "Power Harvesting Using Piezoelectric MEMS Generator with Interdigital Electrodes", 2007 IEEE ULTRASONICS SYMPOSIUM, 28 October 2007 (2007-10-28), pages 1598 - 1601
See also references of EP 2562837A4
R. VAN SCHAIJK ET AL.: "Piezoelectric AIN energy harvesters for wireless autonomoustransducer solutions", IEEE SENSORS 2008 CONFERENCE, 2008, pages 45 - 48
Attorney, Agent or Firm:
NISHIKAWA, Yoshikiyo et al. (Hokuto Patent Attorneys Office, Umeda Square Bldg. 9F., 12-17, Umeda 1-chome, Kita-ku, Osaka-sh, Osaka 01, 〒5300001, JP)
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Claims: