Title:
FERROELECTRIC THIN FILM AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2012/124409
Kind Code:
A1
Abstract:
In order to obtain a ferroelectric thin film having good crystallinity and realizing high piezoelectric properties, and a production method therefor, provided is a ferromagnetic thin film constituting a dielectric material having a perovskite structure that comprises Zr and Ti formed on a substrate, wherein a layer having a Zr ratio that is smaller than a predetermined ratio and having good crystallinity and a layer that realizes good piezoelectric properties and has a Zr ratio that is about as great as the predetermined ratio are combined. A production method is also provided.
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Inventors:
EGUCHI HIDEYUKI (JP)
Application Number:
PCT/JP2012/052805
Publication Date:
September 20, 2012
Filing Date:
February 08, 2012
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
EGUCHI HIDEYUKI (JP)
EGUCHI HIDEYUKI (JP)
International Classes:
H01L41/187; C23C14/06; C23C14/08; H01L21/8246; H01L27/105; H01L41/08; H01L41/09; H01L41/18; H01L41/316
Foreign References:
| JP2006303519A | 2006-11-02 | |||
| JP2005322941A | 2005-11-17 | |||
| JP2008004781A | 2008-01-10 | |||
| JP2010214800A | 2010-09-30 | |||
| JP2010219079A | 2010-09-30 | |||
| JPH06290983A | 1994-10-18 | |||
| JP2007042984A | 2007-02-15 |
Other References:
GENE H. HEARTLING: "Ferroelectric Ceramics: History and Technology", JOURNAL OF AMERICAN CERAMIC SOCIETY, vol. 82, no. 4, 1999, pages 797 - 818
See also references of EP 2688116A4
See also references of EP 2688116A4
Attorney, Agent or Firm:
SANO SHIZUO (JP)
Shizuo Sano (JP)
Shizuo Sano (JP)
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Claims:
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