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Title:
FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER AND METHOD FOR PRODUCING FERROELECTRIC THIN FILM
Document Type and Number:
WIPO Patent Application WO/2015/125520
Kind Code:
A1
Abstract:
This ferroelectric thin film is formed from lead lanthanum zirconate titanate. In this ferroelectric thin film, the ratio (a) of lanthanum relative to the sum of lead and lanthanum is from 6% to 8% (inclusive) on a molar basis, and the ratio (b) of zirconium relative to the sum of zirconium and titanium is from 54% to 59% (inclusive) on a molar basis.

Inventors:
MAWATARI KENJI (JP)
Application Number:
PCT/JP2015/050861
Publication Date:
August 27, 2015
Filing Date:
January 15, 2015
Export Citation:
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Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/187; B41J2/14; C01G25/00; C23C14/08; H01L21/316; H01L41/09; H01L41/316; H01L41/319
Domestic Patent References:
WO2013132903A12013-09-12
WO2012124409A12012-09-20
Other References:
Z. HU ET AL.: "Relaxor behavior and energy storage performance of ferroelectric PLZT thin films with different Zr/Ti ratios", CERAMICS INTERNATIONAL, vol. 40, 18 June 2013 (2013-06-18), pages 557 - 562, XP028769827, ISSN: 0272-8842
R.SINGH ET AL.: "Sol-Gel Derived La Modified PZT Thin Films: Structure and Properties, Dielectrics and Electrical Insulation", IEEE TRANSACTIONS, vol. 11, no. Issue 2, April 2004 (2004-04-01), pages 264 - 270, XP055221034
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
Patent business corporation Sano patent firm (JP)
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