Title:
FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER
Document Type and Number:
WIPO Patent Application WO/2015/174265
Kind Code:
A1
Abstract:
This ferroelectric thin film comprises lead zirconate titanate niobate. In said ferroelectric thin film, the ratio (a) of number of moles of lead to the total number of moles of zirconium, titanium, and niobium is greater than or equal to 100%; the ratio (b) of the number of moles of niobium to the total number of moles of zirconium, titanium, and niobium is between 10% and 20%, inclusive; and the ratio (c) of the number of moles of zirconium to the total number of moles of zirconium and titanium is between 52% and 59%, inclusive. The film stress exhibited by the ferroelectric thin film is between 100 and 250 MPa, inclusive.
Inventors:
MAWATARI KENJI (JP)
Application Number:
PCT/JP2015/062720
Publication Date:
November 19, 2015
Filing Date:
April 27, 2015
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/187; B41J2/14; H01L41/09; H01L41/319
Foreign References:
| JP2012009677A | 2012-01-12 | |||
| JP2008258575A | 2008-10-23 | |||
| JP2013229510A | 2013-11-07 | |||
| JP2009252786A | 2009-10-29 |
Other References:
See also references of EP 3144987A4
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
Patent business corporation Sano patent firm (JP)
Patent business corporation Sano patent firm (JP)
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