Title:
FERROMAGNETIC MATERIAL SPUTTERING TARGET WITH LITTLE PARTICLE GENERATION
Document Type and Number:
WIPO Patent Application WO/2012/011294
Kind Code:
A1
Abstract:
Disclosed is a non-magnetic material dispersion-type ferromagnetic material sputtering target in which non-magnetic material particles comprising oxides are dispersed in a metal having a composition containing 20 mol% or less of Cr, and Co as the remainder, wherein: the target composition contains a phase (A) in which non-magnetic material particles comprising oxides are dispersed in a metal base, and a metal phase (B), which has a different component composition than the metal base, in phase (A); the area ratio occupied by the oxide within 2 µm from the outermost circumference of the metal phase (B) is 80% or less; and the metal phase (B) has an average particle diameter of 10 to 150 µm. As a consequence, a ferromagnetic material sputtering target is obtained wherein it is possible to prevent particle generation during sputtering and to stably discharge in a magnetron sputter device by improving the leakage magnetic flux.
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Inventors:
OGINO Shin-ichi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
荻野 真一 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
SATO Atsushi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
佐藤 敦 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
荻野 真一 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
SATO Atsushi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
佐藤 敦 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
Application Number:
JP2011/051766
Publication Date:
January 26, 2012
Filing Date:
January 28, 2011
Export Citation:
Assignee:
JX Nippon Mining & Metals Corporation (6-3 Otemachi 2-chome, Chiyoda-ku Tokyo, 64, 〒1008164, JP)
ＪＸ日鉱日石金属株式会社 (〒64 東京都千代田区大手町二丁目６番３号 Tokyo, 〒1008164, JP)
OGINO Shin-ichi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
荻野 真一 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
SATO Atsushi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
ＪＸ日鉱日石金属株式会社 (〒64 東京都千代田区大手町二丁目６番３号 Tokyo, 〒1008164, JP)
OGINO Shin-ichi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
荻野 真一 (〒35 茨城県北茨城市華川町臼場１８７番地４ ＪＸ日鉱日石金属株式会社 磯原工場内 Ibaraki, 〒3191535, JP)
SATO Atsushi (187-4 Usuba, Hanakawa-cho, Kitaibaraki-sh, Ibaraki 35, 〒3191535, JP)
International Classes:
C23C14/34; C22C1/04; C22C19/07; G11B5/851; H01F10/16; H01F41/18
Attorney, Agent or Firm:
OGOSHI Isamu (OGOSHI International Patent Office, Daini-Toranomon Denki Bldg. 5F, 1-10, Toranomon 3-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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