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Title:
FIELD EMISSION APPARATUS AND HAND-HELD NONDESTRUCTIVE INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/063379
Kind Code:
A1
Abstract:
In the present invention, heat dissipation is improved by extending the creeping distance in a vacuum vessel according to the size of a flange part, without lengthening the vacuum vessel in the direction in which an electron beam is emitted. A vacuum vessel (20) in which a flange portion (20a) having a hollow portion between a cold cathode (9) and an anode (11) is formed is used. One example is a vacuum vessel (20) in which a cold cathode vessel (21) and an anode vessel (22), both cylindrically shaped, are communicated with each other and a hollow flange portion (20a) is formed between the vessels (21, 22). A focusing electrode (14) and a getter material (15), for example, are disposed in the hollow portion of the flange portion (20a). A cold cathode (9) which has a guard electrode on the outer side of the periphery of a carbon film structure (10) formed on a substrate (7) may be used. The carbon film structure (10) may be formed in the middle of an electrode surface of the substrate (7).

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Inventors:
ISHIGURO, Yoshihisa (1-4-12 Nishi-Shinbashi, Minato-k, Tokyo 03, 〒1050003, JP)
石黒 義久 (〒03 東京都港区西新橋1-4-12株式会社ライフ技術研究所内 Tokyo, 〒1050003, JP)
Application Number:
JP2011/003242
Publication Date:
May 18, 2012
Filing Date:
June 08, 2011
Export Citation:
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Assignee:
Life Technology Research Institute Inc. (1-4-12, Nishi-Shinbashi Minato-k, Tokyo 03, 〒1050003, JP)
株式会社ライフ技術研究所 (〒03 東京都港区西新橋1-4-12 Tokyo, 〒1050003, JP)
ISHIGURO, Yoshihisa (1-4-12 Nishi-Shinbashi, Minato-k, Tokyo 03, 〒1050003, JP)
International Classes:
H01J5/02; G21K5/00; G21K5/02; H01J1/46; H01J7/24; H01J35/16; H05G1/04
Domestic Patent References:
WO2010150438A12010-12-29
Foreign References:
JP2005032638A2005-02-03
JPS5539104A1980-03-18
JPS56137358U1981-10-17
JP2010056062A2010-03-11
JPS6097531A1985-05-31
JP2002299098A2002-10-11
JPS61140041A1986-06-27
JPS5844662A1983-03-15
JPH04132147A1992-05-06
JP2008218053A2008-09-18
JP2011119084A2011-06-16
JP2008150253A2008-07-03
JP2008150682A2008-07-03
JP2010056062A2010-03-11
JPH0574394B21993-10-18
JP2006066075A2006-03-09
JP2002093307A2002-03-29
Other References:
See also references of EP 2642505A4
Attorney, Agent or Firm:
KOYAMA, Yuu (201E Shin-Kasumigaseki Bldg, 3-3-2, Kasumigaseki, Chiyoda-k, Tokyo 13, 〒1000013, JP)
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Claims: