Title:
FIELD EMISSION CATHODE ELECTRON SOURCE AND ARRAY THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/042549
Kind Code:
A1
Abstract:
Provided in an embodiment of the present invention are a field emission cathode electron source and an array thereof, comprising: a substrate, and a cathode, cathode tip and gate that are disposed at the same side of the substrate. By means of the cathode, cathode tip and gate being disposed on an upper surface of the substrate, and the cathode tip being connected on the cathode, the gate is located at a side of the cathode tip that is far from the cathode, and an electron emission end of the cathode tip points toward a side surface of the substrate near the gate. The cathode tip is arranged in parallel on the substrate in order to attach to the substrate, which is equivalent to the three-dimensional stacked structure in the existing technology; the present invention has greater stability and reliability, and is suitable for large-scale integration.
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Inventors:
LU WEIER (CN)
XIA YANG (CN)
XIA YANG (CN)
Application Number:
PCT/CN2019/076083
Publication Date:
March 05, 2020
Filing Date:
February 25, 2019
Export Citation:
Assignee:
THE INST OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES (CN)
International Classes:
H01J1/304
Foreign References:
CN101110306A | 2008-01-23 | |||
CN101110306A | 2008-01-23 | |||
CN102064071A | 2011-05-18 |
Attorney, Agent or Firm:
BEIJING BRIGHT & RIGHT LAW FIRM (CN)
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