Title:
FIELD-EMISSION CATHODE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2002/037518
Kind Code:
A1
Abstract:
A field-emission cathode having an emitter provided with a substrate (11), an emitter electrode layer (12), an insulating layer, a gate electrode layer, the layers being formed on the substrate (11) in this order, needlelike projections (15-1, 15-2, 15-3) for electron emission provided on the emitter electrode layer (12) in a gate opening from which the insulating layer and the gate electrode layer are removed and each grown from one point in a given direction, and different projections for electron emission formed on all or part of the projections (15-1, 15-2, 15-3). The projections (15-1, 15-2, 15-3) of the emitter are made of metallic particles (13), and thereby the manufacturing cost is lowered.
Inventors:
Inoue, Kazunori c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Betsui, Keiichi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Nakatani, Tadashi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Toyoda, Osamu c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Betsui, Keiichi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Nakatani, Tadashi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Toyoda, Osamu c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Application Number:
PCT/JP2000/007795
Publication Date:
May 10, 2002
Filing Date:
November 06, 2000
Export Citation:
Assignee:
FUJITSU LIMITED (1-1 Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Inoue, Kazunori c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Betsui, Keiichi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Nakatani, Tadashi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Toyoda, Osamu c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Inoue, Kazunori c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Betsui, Keiichi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Nakatani, Tadashi c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
Toyoda, Osamu c/o Fujitsu Limited 1-1 (Kamikodanaka 4-chome Nakahara-ku Kawasaki-shi, Kanagawa, 211-8588, JP)
International Classes:
H01J1/304; H01J9/02; H01J1/30; H01J9/02; (IPC1-7): H01J1/304; H01J9/02
Attorney, Agent or Firm:
Nogawa, Shintaro (Minamimorimachi Park Building 1-3, Nishitenma 5-chome Kita-ku Osaka-shi, Osaka, 530-0047, JP)
Download PDF: