Title:
FIELD EMISSION DEVICES HAVING CARBON CONTAINING TIPS
Document Type and Number:
WIPO Patent Application WO2002019372
Kind Code:
A3
Abstract:
Systems and methods are described for field emission devices having carbon nanofiber emitters. A method, includes: providing a substance; depositing a catalyst, the catalyst coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming dielectric well in the dielectric layer to uncover at least a portion of the catalyst; and then fabricating a carbon containing tip (i) having a base located substantially at the bottom of the dielectric well and (ii) extending substantially away from the substrate. An apparatus, includes: a substrate; an electrode structure coupled to the substrate, the electrode structure including a dielectric layer coupled to the substrate, the dielectric layer including a dielectric well that is formed in the dielectric layer after the dielectric layer is deposited; and an extractor layer coupled to the dielectric layer, the extractor layer including an extractor aperture; and a carbon containing tip coupled to the substrate, the carbon containing tip having a base located substantially at a bottom of the dielectric well and extending substantially away form the substrate, the carbon containing tip being grown from the bottom of the dielectric well using a catalyst that is introduced at the bottom of the dielectric well is formed. A method, includes: providing a substrate on a heater plate in a vacuum chamber; providing a carbon source gas and an etchant gas; heating the substrate with the heater plate; and then fabricating a carbon tip on the substrate with the carbon source gas and the etchant gas using plasma enhanced chemical vapor.
Inventors:
MERKULOV VLADIMIR I (US)
LOWNDES DOUGLAS H (US)
GUILLORN MICHAEL A (US)
SIMPSON MICHAEL L (US)
BRITTON CHARLES L (US)
LOWNDES DOUGLAS H (US)
GUILLORN MICHAEL A (US)
SIMPSON MICHAEL L (US)
BRITTON CHARLES L (US)
Application Number:
PCT/US2001/025270
Publication Date:
June 06, 2002
Filing Date:
August 09, 2001
Export Citation:
Assignee:
UT BATTELLE LLC (US)
MERKULOV VLADIMIR I (US)
LOWNDES DOUGLAS H (US)
GUILLORN MICHAEL A (US)
SIMPSON MICHAEL L (US)
BRITTON CHARLES L (US)
MERKULOV VLADIMIR I (US)
LOWNDES DOUGLAS H (US)
GUILLORN MICHAEL A (US)
SIMPSON MICHAEL L (US)
BRITTON CHARLES L (US)
International Classes:
H01J3/02; H01J9/02; (IPC1-7): H01J9/02
Foreign References:
| US5872422A | 1999-02-16 | |||
| US6062931A | 2000-05-16 |
Other References:
REN, Z F ET AL.: "Synthesis of large arrays of well-aligned carbon nanotubes on glass", SCIENCE, vol. 286, 6 November 1998 (1998-11-06), pages 1105 - 1107, XP002190875
DRISKIL-SMITH, A A G ET AL.: "fabrication and behaviour of nanoscale field emission structures", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B., vol. 15, no. 6, November 1997 (1997-11-01), AMERICAN INSTITUTE OF PHYSICS. NEW YORK. 31985 1, US, pages 2773 - 2776, XP002190876, ISSN: 0734-211X
REN Z F ET AL: "GROWTH OF A SINGLE FREESTANDING MULTIWALL CARBON NANOTUBE ON EACH NANONICKEL DOT", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 75, no. 8, 23 August 1999 (1999-08-23), pages 1086 - 1088, XP000868178, ISSN: 0003-6951
DRISKIL-SMITH, A A G ET AL.: "fabrication and behaviour of nanoscale field emission structures", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B., vol. 15, no. 6, November 1997 (1997-11-01), AMERICAN INSTITUTE OF PHYSICS. NEW YORK. 31985 1, US, pages 2773 - 2776, XP002190876, ISSN: 0734-211X
REN Z F ET AL: "GROWTH OF A SINGLE FREESTANDING MULTIWALL CARBON NANOTUBE ON EACH NANONICKEL DOT", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 75, no. 8, 23 August 1999 (1999-08-23), pages 1086 - 1088, XP000868178, ISSN: 0003-6951
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