FIELD EMISSION ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE

Title:

FIELD EMISSION ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/149862

Kind Code:

A1

Abstract:

In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament (107), a metal tube (108) joined thereto, a hexaboride tip (104) that emits electrons, and graphite sheets (109) that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.

Inventors:

KUSUNOKI TOSHIAKI (JP)
HASHIZUME TOMIHIRO (JP)
KASUYA KEIGO (JP)
OHSHIMA TAKASHI (JP)
SAKAI YUSUKE (JP)
OSE YOICHI (JP)
ARAI NORIAKI (JP)

Application Number:

PCT/JP2016/084726

Publication Date:

September 08, 2017

Filing Date:

November 24, 2016

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J1/304; H01J9/02; H01J37/06; H01J37/073

Foreign References:

JP2015518245A	2015-06-25
JP2011014529A	2011-01-20
JP2009026710A	2009-02-05
JPS55104043A	1980-08-09
JP2011181339A	2011-09-15
JPS6183245U	1986-06-02