FIELD EMISSION ELECTRON SOURCE AND PRODUCTION METHOD THEREOF

Title:

FIELD EMISSION ELECTRON SOURCE AND PRODUCTION METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2002/089166

Kind Code:

A1

Abstract:

In a field emission electron source (10), a strong field drift layer (6) and a surface electrode (7) composed of a thin metal film are arranged on an n-type silicon substrate (1). On the back surface of the n-type silicon substrate (1), an ohmic electrode (2) is arranged. DC voltage is applied so that the surface electrode (7) has a positive potential with respect to the ohmic electrode (2). Thus, electrons injected from the ohmic electrode (2) via the n-type silicon substrate (1) to the strong field drift layer (6) drift in the strong field drift layer (6) and are emitted outside via the surface electrode (7). The strong field drift layer (6) includes a plenty of fine semiconductor crystals (63) of nanometer order formed in a part of the semiconductor layer constituting the strong field drift layer (6) and a plenty of insulation films (64) formed on the surface of the fine semiconductor crystals (63) and having a film thickness generating the electron tunneling phenomenon.

Inventors:

Komoda, Takuya c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Aizawa, Koichi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Honda, Yoshiaki c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Ichihara, Tsutomu c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Watabe, Yoshifumi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Hatai, Takashi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Baba, Toru c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Takegawa, Yoshiyuki c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)

Application Number:

PCT/JP2002/004054

Publication Date:

November 07, 2002

Filing Date:

April 24, 2002

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC WORKS, LTD. (1048, Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Komoda, Takuya c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Aizawa, Koichi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Honda, Yoshiaki c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Ichihara, Tsutomu c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Watabe, Yoshifumi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Hatai, Takashi c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Baba, Toru c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Takegawa, Yoshiyuki c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)

International Classes:

H01J1/304; H01J1/312; H01J9/02; (IPC1-7): H01J1/312; H01J9/02

Attorney, Agent or Firm:

Aoyama, Tamotsu (AOYAMA & PARTNERS IMP Building, 3-7 Shiromi 1-chome Chuo-k, Osaka-shi Osaka, 540-0001, JP)

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