FILLER FOR CROSSLINKABLE ELASTOMER AND CROSSLINKABLE ELASTOMER COMPOSITION CONTAINING THE SAME

Title:

FILLER FOR CROSSLINKABLE ELASTOMER AND CROSSLINKABLE ELASTOMER COMPOSITION CONTAINING THE SAME

Document Type and Number:

WIPO Patent Application WO/2000/064980

Kind Code:

A1

Abstract:

A filler which is for use in compositions, such as sealing materials, to be used for sealing in semiconductor production apparatuses, where inclusion of foreign substances should be highly prevented, and which changes little in weight upon irradiation with either an oxygen plasma or a CF¿4? plasma. The filler for use in crosslinkable elastomers having an imide structure has a weight change through irradiation with each of an oxygen plasma and a CF¿4? plasma of 4 mg/cm?2¿. hr or smaller. The crosslinkable elastomer composition comprises the filler and a crosslinkable elastomer such as a fluoroelastomer.

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Inventors:

KAWAGUCHI SEIJI (JP)
NOGUCHI TSUYOSHI (JP)
YAMATO TAKAFUMI (JP)
KISHINE MITSURU (JP)

Application Number:

PCT/JP2000/002567

Publication Date:

November 02, 2000

Filing Date:

April 20, 2000

Export Citation:

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Assignee:

DAIKIN IND LTD (JP)
KAWAGUCHI SEIJI (JP)
NOGUCHI TSUYOSHI (JP)
YAMATO TAKAFUMI (JP)
KISHINE MITSURU (JP)

International Classes:

C08J5/00; C08J7/04; C08K5/3477; C08L27/12; H01L21/302; C08L27/16; C08L79/08; C08L83/04; C09D7/12; C09D121/00; C09D127/12; C09K3/10; H01L21/3065; (IPC1-7): C08L79/08; C08K5/16; C08F299/02; C08F299/04

Foreign References:

JPS61281152A	1986-12-11
JPS59108068A	1984-06-22
JPH03237150A	1991-10-23

Other References: