Title:
FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/184863
Kind Code:
A1
Abstract:
A film bulk acoustic resonator and a manufacturing method therefor, a filter, and an electronic device. The manufacturing method comprises: forming an electrode layer (02) and etching the electrode layer (02). The step of etching the electrode layer (02) comprises: forming a light blocking layer (03) on the electrode layer (02), the light blocking layer (03) being capable of blocking pass-through of light and capable of serving as a mask layer for patterning the electrode layer (02); forming a photosensitive material layer (04) on the light blocking layer (03); etching the light blocking layer (03) by taking the photosensitive material layer (04) as a mask to enable a pattern formed on the light blocking layer (03) to be the same as a pattern pre-formed on the electrode layer (02); and etching the electrode layer (02) by taking the light blocking layer (03) as a mask, so as to form, in the electrode layer (02), at least two side surfaces serving as effective resonance region boundaries, an included angle being defined between two adjacent side surfaces, and the arc radius of the included angle being less than 1 micron.
Inventors:
HUANG HERB HE (CN)
LUO HAILONG (CN)
LI WEI (CN)
LUO HAILONG (CN)
LI WEI (CN)
Application Number:
PCT/CN2020/137049
Publication Date:
September 23, 2021
Filing Date:
December 17, 2020
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORP (CN)
International Classes:
H03H9/02; H03H9/17
Domestic Patent References:
| WO2018100840A1 | 2018-06-07 |
Foreign References:
| CN109150135A | 2019-01-04 | |||
| CN110868187A | 2020-03-06 | |||
| CN103077925A | 2013-05-01 | |||
| CN112039476A | 2020-12-04 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
Download PDF:
Previous Patent: MESSAGE SENDING METHOD, FIRST NETWORK DEVICE, AND NETWORK SYSTEM
Next Patent: RANGE HOOD AND CONTROL METHOD THEREFOR
Next Patent: RANGE HOOD AND CONTROL METHOD THEREFOR