Title:
FILM BULK ACOUSTIC RESONATOR, MANUFACTURING METHOD THEREFOR AND FILTER THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/057466
Kind Code:
A1
Abstract:
The present invention relates to a film bulk acoustic wave resonator, a manufacturing method therefor and a filter thereof. The film bulk acoustic wave resonator comprises a piezoelectric laminated structure; the piezoelectric laminated structure comprises a first electrode, a piezoelectric layer and a second electrode sequentially stacked from bottom to top; at least one of the first electrode and the second electrode has an annular groove penetrating through a corresponding electrode; an electrode extraction structure is provided on the corresponding electrode provided with the annular groove; the electrode extraction structure covers at least part of the annular groove and extends to an invalid resonance region; the electrode extraction structure comprises an annular arch bridge protruding away from the piezoelectric layer; an annular gap is enclosed by the inner surface of the arch bridge; and the annular gap is opposite to the annular groove. According to the present invention, the boundary of an valid region is defined by a region where the annular gap of the electrode extraction structure is located, and the end portion of the corresponding electrode is in contact with gas in the gap at the boundary of the valid region by means of the annular groove, to achieve the effect of eliminating boundary noise of the electrode of the valid region, thereby increasing a Q value of the resonator.
Inventors:
HUANG HERB HE (CN)
Application Number:
PCT/CN2021/109531
Publication Date:
March 24, 2022
Filing Date:
July 30, 2021
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H9/02; H03H3/02; H03H9/13; H03H9/205; H03H9/58
Foreign References:
| CN111130486A | 2020-05-08 | |||
| CN111082777A | 2020-04-28 | |||
| US20150207489A1 | 2015-07-23 | |||
| JP2005045694A | 2005-02-17 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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