Title:
FILM BULK ACOUSTIC RESONATOR MODELING METHOD TAKING TEMPERATURE EFFECT INTO ACCOUNT
Document Type and Number:
WIPO Patent Application WO/2023/206831
Kind Code:
A1
Abstract:
A film bulk acoustic resonator modeling method taking a temperature effect into account, the method comprising: establishing a film bulk acoustic resonator simulation model, in which a film bulk acoustic resonator and core parameters thereof are provided; deriving an equivalent circuit of a Mason model according to an acoustic wave theory and a transmission line theory; and in the Mason model, temperature values being required to be added to sound velocity v_x and acoustic impedance Z_x parameters of a piezoelectric layer and other common acoustic layers that comprise upper and lower electrode layers, a temperature compensation layer, etc., and introducing the influence of temperature on the resonator into a one-dimensional simulation model. A method for setting a temperature parameter value in a longitudinal-wave sound velocity and an acoustic impedance of a film layer material is provided. Therefore, during the process of modeling and simulating a film bulk acoustic resonator, the influence of a change in ambient temperature on performance parameters, such as a resonance frequency, an impedance value and an electromechanical coupling coefficient, of the resonator is fully taken into account, such that the simulation precision of a model is more accurate.
Inventors:
WU XIUSHAN (CN)
CUI JIAMING (CN)
XU LIN (CN)
ZHOU XIAOWEI (CN)
CAI JIANPING (CN)
YAN SHUBIN (CN)
ZHANG GUOQIN (CN)
CUI JIAMING (CN)
XU LIN (CN)
ZHOU XIAOWEI (CN)
CAI JIANPING (CN)
YAN SHUBIN (CN)
ZHANG GUOQIN (CN)
Application Number:
PCT/CN2022/106783
Publication Date:
November 02, 2023
Filing Date:
July 20, 2022
Export Citation:
Assignee:
UNIV ZHEJIANG WATER RESOURCES & ELECTRIC POWER (CN)
International Classes:
G06F30/398; G06F30/392; G06F119/08
Foreign References:
| CN112287635A | 2021-01-29 | |||
| CN113536729A | 2021-10-22 | |||
| CN106712738A | 2017-05-24 | |||
| CN110287653A | 2019-09-27 | |||
| CN106446321A | 2017-02-22 | |||
| US20150263697A1 | 2015-09-17 |
Attorney, Agent or Firm:
BEIJING ZHUOSHENG BAIDA IP AGENT LTD. (CN)
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