Title:
FILM BULK ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2019/141073
Kind Code:
A1
Abstract:
The present invention provides a film bulk acoustic resonator, comprising a layered structure composed of a top electrode, a piezoelectric layer, and a bottom electrode; and a substrate. A reflective interface is provided between the bottom electrode and the substrate. By defining the shape of the overall or part of the layered structure, the purpose of suppressing a lateral standing wave is achieved without adding a new process, the manufacturing cost of the device is controlled, and the benefit of product development is maximized.
Inventors:
LIAO PEICHUN (CN)
LIN RUIQIN (CN)
ZHAO JUNWU (CN)
LIN RUIQIN (CN)
ZHAO JUNWU (CN)
Application Number:
PCT/CN2018/125238
Publication Date:
July 25, 2019
Filing Date:
December 29, 2018
Export Citation:
Assignee:
WUHAN YANXI MICRO COMPONENTS CO LTD (CN)
International Classes:
H03H9/13; H03H9/17
Foreign References:
| CN108134588A | 2018-06-08 | |||
| CN207869078U | 2018-09-14 | |||
| CN108134589A | 2018-06-08 | |||
| CN207869079U | 2018-09-14 | |||
| CN1845453A | 2006-10-11 | |||
| CN1794572A | 2006-06-28 | |||
| CN1364339A | 2002-08-14 | |||
| US20140125202A1 | 2014-05-08 |
Other References:
See also references of EP 3723285A4
Attorney, Agent or Firm:
HUBEI WUHAN YONGJIA PATENT AGENCY CO., LTD (CN)
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