Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FILM BULK ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2019/141073
Kind Code:
A1
Abstract:
The present invention provides a film bulk acoustic resonator, comprising a layered structure composed of a top electrode, a piezoelectric layer, and a bottom electrode; and a substrate. A reflective interface is provided between the bottom electrode and the substrate. By defining the shape of the overall or part of the layered structure, the purpose of suppressing a lateral standing wave is achieved without adding a new process, the manufacturing cost of the device is controlled, and the benefit of product development is maximized.

Inventors:
LIAO PEICHUN (CN)
LIN RUIQIN (CN)
ZHAO JUNWU (CN)
Application Number:
CN2018/125238
Publication Date:
July 25, 2019
Filing Date:
December 29, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
WUHAN YANXI MICRO COMPONENTS CO LTD (CN)
International Classes:
H03H9/13; H03H9/17
Foreign References:
CN108134588A2018-06-08
CN207869078U2018-09-14
CN108134589A2018-06-08
CN207869079U2018-09-14
CN1845453A2006-10-11
CN1794572A2006-06-28
CN1364339A2002-08-14
US20140125202A12014-05-08
Attorney, Agent or Firm:
HUBEI WUHAN YONGJIA PATENT AGENCY CO., LTD (CN)
Download PDF: