Title:
FILM COIL COATING SYSTEM FOR MANUFACTURING MULTIPLE FILMS ON FLEXIBLE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/206323
Kind Code:
A1
Abstract:
A film coil coating system for manufacturing multiple films on a flexible substrate. Multiple coating chambers and multiple coating rollers are provided in one-to-one correspondence. Each of the coating chambers comprises one or more sputtering unit. Each sputtering unit comprises a lifting and lowering device (29), a magnetron sputtering target connected to the lifting and lowering device (29), and two target shutters (27). The two target shutters (27) are located between the magnetron sputtering target (28) and the coating rollers and are spaced to form sputtering intervals (26) extending between the magnetron sputtering target (28) and the coating rollers. The magnetron sputtering target (28) and the lifting and lowering device (29) are connected to an electrical control device. Each sputtering interval (26) is provided with a gas pumping valve and a gas distribution valve, both of which are connected to the electrical control device.
Inventors:
LIU KUN (CN)
HU QIANG (CN)
SUN FEI (CN)
HUANG AIQING (CN)
HU QIANG (CN)
SUN FEI (CN)
HUANG AIQING (CN)
Application Number:
PCT/CN2019/084746
Publication Date:
October 31, 2019
Filing Date:
April 28, 2019
Export Citation:
Assignee:
UNIV NORTHEASTERN (CN)
International Classes:
C23C14/35; C23C14/56
Foreign References:
| CN104593743A | 2015-05-06 | |||
| CN103290379A | 2013-09-11 | |||
| CN2433262Y | 2001-06-06 | |||
| CN202090052U | 2011-12-28 | |||
| CN101100742A | 2008-01-09 | |||
| CN101191195A | 2008-06-04 |
Attorney, Agent or Firm:
BEIJING EASY JOY SOON IP AGENT LTD (CN)
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