Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FILM FORMATION DEVICE AND FILM FORMATION METHOD FOR FORMING METAL FILM
Document Type and Number:
WIPO Patent Application WO/2013/125643
Kind Code:
A1
Abstract:
Provided are a film formation device for forming a metal film and a film formation method for forming same, with which it is possible to continuously form, on the surfaces of a plurality of base materials, metal films having a desired film thickness. This film formation device (1A) comprises at least: a positive electrode (11); a negative electrode (12); a solid electrolyte film (13) arranged on the surface of the positive electrode (11) and between the positive electrode and a base material serving as the negative electrode; and a power source unit (E) that applies a voltage between the positive electrode (11) and the base material (B). A metal film (F) made of a metal is formed by applying a voltage between the positive electrode (11) and the base material (B) and depositing a metal on the surface of the base material from metal ions contained inside the solid electrolyte film (13). The positive electrode (11) is made of a porous body through which a solution (L) containing the metal ions passes and that supplies the metal ions to the solid electrolyte film (13).

Inventors:
HIRAOKA MOTOKI (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
Application Number:
PCT/JP2013/054355
Publication Date:
August 29, 2013
Filing Date:
February 21, 2013
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOYOTA MOTOR CO LTD (JP)
HIRAOKA MOTOKI (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
International Classes:
C25D17/12; C25D17/14
Foreign References:
JPH01165786A1989-06-29
JPH0570986A1993-03-23
JP2004225119A2004-08-12
JP2008522040A2008-06-26
JP2012219362A2012-11-12
JP2010037622A2010-02-18
Other References:
See also references of EP 2818585A4
"Fabrication of Silver Patterns on Polyimide Films Based on Solid-Phase Electrochemical Constructive Lithography Using Ion-Exchangeable Precursor Layers", LANGMUIR, vol. 27, no. 19, 2011, pages 11761 - 11766
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Download PDF:
Claims: