Title:
FILM FORMATION DEVICE AND FILM FORMATION METHOD FOR FORMING METAL FILM
Document Type and Number:
WIPO Patent Application WO/2013/125643
Kind Code:
A1
Abstract:
Provided are a film formation device for forming a metal film and a film formation method for forming same, with which it is possible to continuously form, on the surfaces of a plurality of base materials, metal films having a desired film thickness. This film formation device (1A) comprises at least: a positive electrode (11); a negative electrode (12); a solid electrolyte film (13) arranged on the surface of the positive electrode (11) and between the positive electrode and a base material serving as the negative electrode; and a power source unit (E) that applies a voltage between the positive electrode (11) and the base material (B). A metal film (F) made of a metal is formed by applying a voltage between the positive electrode (11) and the base material (B) and depositing a metal on the surface of the base material from metal ions contained inside the solid electrolyte film (13). The positive electrode (11) is made of a porous body through which a solution (L) containing the metal ions passes and that supplies the metal ions to the solid electrolyte film (13).
Inventors:
HIRAOKA MOTOKI (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
Application Number:
PCT/JP2013/054355
Publication Date:
August 29, 2013
Filing Date:
February 21, 2013
Export Citation:
Assignee:
TOYOTA MOTOR CO LTD (JP)
HIRAOKA MOTOKI (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
HIRAOKA MOTOKI (JP)
YANAGIMOTO HIROSHI (JP)
SATO YUKI (JP)
YOSHIOKA TAKAYASU (JP)
International Classes:
C25D17/12; C25D17/14
Foreign References:
JPH01165786A | 1989-06-29 | |||
JPH0570986A | 1993-03-23 | |||
JP2004225119A | 2004-08-12 | |||
JP2008522040A | 2008-06-26 | |||
JP2012219362A | 2012-11-12 | |||
JP2010037622A | 2010-02-18 |
Other References:
See also references of EP 2818585A4
"Fabrication of Silver Patterns on Polyimide Films Based on Solid-Phase Electrochemical Constructive Lithography Using Ion-Exchangeable Precursor Layers", LANGMUIR, vol. 27, no. 19, 2011, pages 11761 - 11766
"Fabrication of Silver Patterns on Polyimide Films Based on Solid-Phase Electrochemical Constructive Lithography Using Ion-Exchangeable Precursor Layers", LANGMUIR, vol. 27, no. 19, 2011, pages 11761 - 11766
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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Claims:
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