Title:
FILM FORMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/140858
Kind Code:
A1
Abstract:
Provided is a film formation device that forms a film on a substrate and that is characterized by comprising: a rotation unit that causes a target to rotate around an axis of rotation; a striker for generating an arc discharge; a drive unit that drives the striker so that a proximity state is achieved in which the side surface of the target that is around the axis of rotation and the striker are in proximity when the arc discharge is generated; and a control unit that controls the rotation of the target by the rotation unit so that a facing position on the side surface of the target that faces the striker is changed while in the proximity state.
Inventors:
ATSUMI MASAHIRO (JP)
Application Number:
PCT/JP2014/005736
Publication Date:
September 24, 2015
Filing Date:
November 14, 2014
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
C23C14/24; C23C14/32; G11B5/84
Domestic Patent References:
| WO2013099058A1 | 2013-07-04 |
Foreign References:
| JP2004169132A | 2004-06-17 | |||
| JPH11350115A | 1999-12-21 | |||
| JPH0517866A | 1993-01-26 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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