Title:
FILM FORMATION METHOD AND FILM FORMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/057951
Kind Code:
A1
Abstract:
Provided are a film formation method and a film formation device with which oxidation of the film during film formation can be limited, the device can be configured simply and inexpensively, and the substrate on which the film is to be formed can be exchanged without costing labor or time. The film formation device (100) for forming films by accelerating a starting material powder (2) along with a gas and spraying and depositing said powder (2) still in the solid state on the surface of a substrate (1) is provided with: a chamber (10); a holder (11), which is provided inside the chamber (10) and is for holding the substrate (1); a spray nozzle (12) for spraying the powder (2) along with an inert gas; and a driving unit (15) for moving either the spray nozzle (12) or the holder (11) with respect to the other. The pressure inside the chamber (10) becomes positive as a result of the inert gas sprayed by the spray nozzle (12).
Inventors:
HIRANO SATOSHI (JP)
Application Number:
PCT/JP2013/077391
Publication Date:
April 17, 2014
Filing Date:
October 08, 2013
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
C23C24/04; B05B7/14; B05D1/12
Domestic Patent References:
| WO2012060309A1 | 2012-05-10 |
Foreign References:
| JP2009238641A | 2009-10-15 | |||
| JPH08108267A | 1996-04-30 | |||
| JP2008302311A | 2008-12-18 | |||
| JPH05171399A | 1993-07-09 |
Other References:
See also references of EP 2907896A4
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
Download PDF:
Previous Patent: OPTICAL FILM, METHOD OF MANUFACTURING OPTICAL FILM, POLARIZING PLATE, AND IMAGE DISPLAY DEVICE
Next Patent: VEHICLE BRAKE DEVICE
Next Patent: VEHICLE BRAKE DEVICE