Title:
FILM FORMATION METHOD AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/151095
Kind Code:
A1
Abstract:
Provided is a film formation method that forms a protective film which reduces damage inflicted on an organic layer and seals the organic layer; also provided is a method for manufacturing an organic EL display device. In a first protective film formation step wherein a first protective film (11) is formed, the charged particle density is lower in a film formation region than in a plasma region, and in a second protective film formation step wherein a second protective film (12) is formed, the volume of the protective film (10) formed per unit time is greater than the volume of the protective film (10) formed per unit time in the first protective film formation step.
Inventors:
OKAMOTO TETSUYA
Application Number:
PCT/JP2013/060217
Publication Date:
October 10, 2013
Filing Date:
April 03, 2013
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H05B33/10; G09F9/30; H01L27/32; H01L51/50; H05B33/04
Domestic Patent References:
| WO2007037358A1 | 2007-04-05 |
Foreign References:
| JP2007038529A | 2007-02-15 | |||
| JP2003257657A | 2003-09-12 | |||
| JP2001135628A | 2001-05-18 | |||
| JP2004327649A | 2004-11-18 | |||
| JP2010508640A | 2010-03-18 | |||
| JP2005222732A | 2005-08-18 | |||
| JP2005174832A | 2005-06-30 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
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