Title:
FILM-FORMED ARTICLE AND METHOD FOR MANUFACTURING FILM-FORMED ARTICLE
Document Type and Number:
WIPO Patent Application WO/2010/140362
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a film-formed article by forming a film, which contains the constituent element of a target, on the surface of a substrate by means of a sputtering method. In the method, the distance (d) between the target and the substrate is set within the range of 0.5-1.5 times the average free path of the constituent element in a sputter gas.
Inventors:
IWAHORI, Koichiro (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
岩堀 恒一郎 (〒31 東京都千代田区有楽町一丁目１２番１号 株式会社ニコン内 Tokyo, 〒1008331, JP)
岩堀 恒一郎 (〒31 東京都千代田区有楽町一丁目１２番１号 株式会社ニコン内 Tokyo, 〒1008331, JP)
Application Number:
JP2010/003691
Publication Date:
December 09, 2010
Filing Date:
June 02, 2010
Export Citation:
Assignee:
NIKON CORPORATION (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区有楽町一丁目１２番１号 Tokyo, 〒1008331, JP)
IWAHORI, Koichiro (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区有楽町一丁目１２番１号 Tokyo, 〒1008331, JP)
IWAHORI, Koichiro (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
International Classes:
C23C14/34; H01B13/00
Attorney, Agent or Firm:
RYUKA IP Law Firm (5F Shinjuku Square Tower, 22-1 Nishi-Shinjuku 6-chome, Shinjuku-k, Tokyo 05, 〒1631105, JP)