Title:
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/118653
Kind Code:
A1
Abstract:
Disclosed is a film-forming apparatus (100) employing an inkjet system, said apparatus being provided with: a head section (50), which has a length that can traverse a substrate (20), and which includes a nozzle (72) that jets a solution to the substrate (20); a stage (10) that holds the substrate (20); a displacement apparatus (30), which relatively displaces the head section (50) and the stage (10); and a control apparatus (35) which controls the jetting performed by the nozzle (72), and the displacement performed by the displacement apparatus (30). The control apparatus (35) controls the displacement apparatus (30) such that a solution (52) jetted second time in a second step (b) is in contact with the surface of a solution (51) jetted first time in a first step (a), and the control apparatus controls the jetting performed by the nozzle (72) such that the quantity of the solution (52) jetted second time is smaller than the quantity of the solution (51) jetted first time.
With such configuration, generation of a region where the solution is not applied by the application using the inkjet system is reduced.
Inventors:
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
NIIHATA, Hiroaki (())
塩崎 唯史 (())
NIIHATA, Hiroaki (())
Application Number:
JP2011/057029
Publication Date:
September 29, 2011
Filing Date:
March 23, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
International Classes:
B05C5/00; B05C9/06; B05D1/26; G02F1/1337
Attorney, Agent or Firm:
TESHIMA Masaru (Teshima Patent Law Firm, 5F MF MinamiMorimachi Bldg. 2-3-8, Tenjinbashi, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Claims:
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