FILM-FORMING APPARATUS - CANON ANELVA CORP

Title:

FILM-FORMING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2014/122700

Kind Code:

A1

Abstract:

A film-forming apparatus is provided with: a first target electrode (35-38) provided with a first attachment part to which a film-forming target can be attached; a substrate holder (33) for holding a substrate in a position facing the first target electrode (35-38); and a second target electrode (41) to which a gettering target can be attached, the second target electrode (41) being provided with a second attachment part that is smaller than the first attachment part.

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Inventors:

KAJIHARA YUJI (JP)

Application Number:

PCT/JP2013/005136

Publication Date:

August 14, 2014

Filing Date:

August 30, 2013

Export Citation:

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Assignee:

CANON ANELVA CORP (JP)

International Classes:

C23C14/34

Foreign References:

JP2012149339A	2012-08-09
JPH0499271A	1992-03-31
JP2012219338A	2012-11-12
JP2004509757A	2004-04-02
JP2005002388A	2005-01-06

Attorney, Agent or Firm:

OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)

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