Title:
FILM FORMING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/132238
Kind Code:
A1
Abstract:
A film forming apparatus according to the present invention comprises a transport unit that transports a substrate, a film forming unit for forming an electrolyte film in a film forming region of the substrate transported by the transport unit, and a foreign matter removing unit that comes into contact with the electrolyte film on the substrate transported by the transport unit after the film has been formed in the film forming unit to remove foreign matter contained in the film forming region.
Inventors:
GIBO MANABU (JP)
HIRONO TAKAYOSHI (JP)
ISO YOSHIKI (JP)
HIRONO TAKAYOSHI (JP)
ISO YOSHIKI (JP)
Application Number:
PCT/JP2020/047942
Publication Date:
July 01, 2021
Filing Date:
December 22, 2020
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C14/58; H01M6/02; H01M6/18; H01M10/052; H01M10/0562; H01M10/058
Domestic Patent References:
| WO2014092041A1 | 2014-06-19 |
Foreign References:
| JP2010242200A | 2010-10-28 | |||
| JP2016156061A | 2016-09-01 | |||
| JP2015102975A | 2015-06-04 | |||
| JP2019236187A | 2019-12-26 | |||
| JP2015514864A | 2015-05-21 |
Other References:
See also references of EP 4083253A4
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
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