Title:
FILM FORMING CONDITION SETTING METHOD, PHOTOELECTRIC CONVERTER, AND MANUFACTURING METHOD, MANUFACTURING APPARATUS AND INSPECTION METHOD FOR THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/029716
Kind Code:
A1
Abstract:
A photoelectric converter having high conversion efficiency is stably manufactured. Specifically,
film forming conditions for a microcrystalline silicon photoelectric conversion
layer (4) in a photoelectric converter are set based on the Raman peak ratio of
the Raman spectrum on the side of a substrate (1) and the Raman peak ratio of the
Raman spectrum on the side opposite to the substrate (1) in the microcrystalline silicon
layer (4).
Inventors:
GOYA, Saneyuki (C/O Advanced Technology Research Center, MITSUBISHI HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-k, Yokohama-shi Kanagawa 15, 2368515, JP)
呉屋 真之 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社 先進技術研究センター内 Kanagawa, 2368515, JP)
NAKANO, Youji (C/O Advanced Technology Research Center, MITSUBISHI HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-k, Yokohama-shi Kanagawa 15, 2368515, JP)
呉屋 真之 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社 先進技術研究センター内 Kanagawa, 2368515, JP)
NAKANO, Youji (C/O Advanced Technology Research Center, MITSUBISHI HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-k, Yokohama-shi Kanagawa 15, 2368515, JP)
Application Number:
JP2007/066944
Publication Date:
March 13, 2008
Filing Date:
August 30, 2007
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES, LTD. (16-5, Konan 2-chome Minato-k, Tokyo 15, 1088215, JP)
三菱重工業株式会社 (〒15 東京都港区港南二丁目１６番５号 Tokyo, 1088215, JP)
GOYA, Saneyuki (C/O Advanced Technology Research Center, MITSUBISHI HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-k, Yokohama-shi Kanagawa 15, 2368515, JP)
呉屋 真之 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社 先進技術研究センター内 Kanagawa, 2368515, JP)
三菱重工業株式会社 (〒15 東京都港区港南二丁目１６番５号 Tokyo, 1088215, JP)
GOYA, Saneyuki (C/O Advanced Technology Research Center, MITSUBISHI HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-k, Yokohama-shi Kanagawa 15, 2368515, JP)
呉屋 真之 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社 先進技術研究センター内 Kanagawa, 2368515, JP)
International Classes:
H01L31/042; C23C16/24; H01L31/042; C23C16/22
Attorney, Agent or Firm:
FUJITA, Takaharu et al. (Mitsubishijuko Yokohama Bldg. 24F, 3-1 Minatomirai 3-chome,Nishi-ku, Yokohama-shi, Kanagawa 1, 220001, JP)
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