Title:
FILM FORMING DEVICE AND FILM FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/002151
Kind Code:
A1
Abstract:
Provided is a film forming device whereby a time needed to form a barrier film in each container can be shortened, and a time for continuously performing operations of forming the barrier film can be lengthened.
A film forming device 100 of the present invention is provided with: a vacuum chamber 10, which houses a resin container P in which a gas barrier film is to be formed, said vacuum chamber being to be brought into a vacuum state when forming the gas barrier film; a gas supply pipe 20, which guides into the container a medium gas G to be used for the purpose of forming the gas barrier film, and which advances and retracts in the axis line direction in a housing region; and a sheath 40 having the housing region for housing at least a part of the gas supply pipe 20. The gas supply pipe 20 is inserted into the resin container P when forming the gas barrier film, and in a stand-by state wherein the gas barrier film is not formed, the gas supply pipe is retracted from the resin container P and is housed in the housing region of the sheath 40, said housing region being maintained in the vacuum state.
Inventors:
MIZUKAWA KENJI (JP)
HIROYA KIYOSHI (JP)
NAKANISHI FUMIKAZU (JP)
HIROYA KIYOSHI (JP)
NAKANISHI FUMIKAZU (JP)
Application Number:
PCT/JP2015/004983
Publication Date:
January 05, 2017
Filing Date:
September 30, 2015
Export Citation:
Assignee:
MITSUBISHI HEAVY IND FOOD & PACKAGING MACHINERY CO LTD (JP)
International Classes:
C23C16/455; B65D23/02
Domestic Patent References:
| WO2013099960A1 | 2013-07-04 | |||
| WO2006126677A1 | 2006-11-30 |
Foreign References:
| JP2013133494A | 2013-07-08 | |||
| JP2005076082A | 2005-03-24 |
Other References:
See also references of EP 3318658A4
Attorney, Agent or Firm:
OBA, Mitsuru et al. (JP)
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