Title:
FILM FORMING DEVICE AND FILM FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/000274
Kind Code:
A1
Abstract:
A film forming device and a film forming method. The film forming device (10) comprises a machine (11). At least two material containers (14, 16) and at least two secondary driving means (13, 15) are provided on the machine (11) side by side; each of the material containers (14, 16) are provided with multiple spraying portions (141, 161) side by side at intervals; the secondary driving means (13, 15) are correspondingly connected to the material containers (14, 16) for driving the material containers (14, 16) to rotate. The film forming method comprises: forming a first thin film on a substrate (100); determining the film thickness of the first thin film at each position; and forming a second thin film on the first thin film according to the determined result, so that the film thickness at each position of a film layer obtained after superposing the second film and the first film is consistent.
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Inventors:
LIU QIFU (CN)
Application Number:
PCT/CN2017/090554
Publication Date:
January 03, 2019
Filing Date:
June 28, 2017
Export Citation:
Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO LTD (CN)
International Classes:
C23C14/54; C23C14/24
Foreign References:
| CN105755433A | 2016-07-13 | |||
| CN102191475A | 2011-09-21 | |||
| CN202968674U | 2013-06-05 | |||
| JP3859875B2 | 2006-12-20 | |||
| US20050279285A1 | 2005-12-22 | |||
| US20050066901A1 | 2005-03-31 | |||
| CN103938161A | 2014-07-23 | |||
| US20150176129A1 | 2015-06-25 |
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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