FILM-FORMING DEVICE

WIPO Patent Application WO/2018/084010

A1

A film-forming device according to an embodiment of the present invention is provided with a chamber main body, a support body, a movement device, a shielding member, a first holder, and a second holder. In this film-forming device, a substrate supported by the support body is linearly moved. The shielding member is provided above a region in which the substrate moves, and a slit extending in the direction orthogonal to the movement direction of the substrate is provided. The first holder and the second holder retain a first target and a second target above the shielding member. The first target and the second target are disposed symmetrically about a vertical plane including a straight-line path over which the center of the substrate moves.

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TOSHIMA HIROYUKI (JP)
HATANO TATSUO (JP)
MIYASHITA TETSUYA (JP)
FURUKAWA SHINJI (JP)
TAKEI JUNICHI (JP)

PCT/JP2017/038142

May 11, 2018

October 23, 2017

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TOKYO ELECTRON LTD (JP)

C23C14/34

WO2011058812A1

2011-05-19

JP2005256032A	2005-09-22
JPH0693426A	1994-04-05
JP2010248587A	2010-11-04
JP2015067856A	2015-04-13

HASEGAWA Yoshiki et al. (JP)

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