Title:
FILM-FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/167355
Kind Code:
A1
Abstract:
A first chamber (100) has a target housing section (110) for housing a target (T1). A second chamber (200) has a substrate support section (210) for supporting a substrate (S1). A partition part (300) has: a cylindrically-shaped section (330); and an opening member (340) which covers a first open end (331) of the cylindrically-shaped section (330) and which also has a plurality of through-holes (341) connecting the first chamber (100) and the second chamber (200). The target housing section (110) is disposed at a position opposite to the substrate support section (210). The opening member (340) is disposed at a position between the target housing section (110) and the substrate support section (210).
Inventors:
HORI MASARU (JP)
ODA OSAMU (JP)
TANIDE ATSUSHI (JP)
TAKATSUJI SHIGERU (JP)
NAKAMURA SHOHEI (JP)
ODA OSAMU (JP)
TANIDE ATSUSHI (JP)
TAKATSUJI SHIGERU (JP)
NAKAMURA SHOHEI (JP)
Application Number:
PCT/JP2018/042647
Publication Date:
September 06, 2019
Filing Date:
November 19, 2018
Export Citation:
Assignee:
UNIV NAGOYA NAT UNIV CORP (JP)
SCREEN HOLDINGS CO LTD (JP)
SCREEN HOLDINGS CO LTD (JP)
International Classes:
C23C14/34
Domestic Patent References:
| WO2018110199A1 | 2018-06-21 |
Foreign References:
| JP2005200681A | 2005-07-28 | |||
| JP2015064531A | 2015-04-09 | |||
| JPH07113173A | 1995-05-02 | |||
| JP2000336477A | 2000-12-05 | |||
| JP2009206348A | 2009-09-10 | |||
| JP2011246788A | 2011-12-08 |
Attorney, Agent or Firm:
FUJITANI Osamu et al. (JP)
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