Title:
FILM-FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/124135
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a film-forming method with which it is possible to increase the film formation speed when film formation is performed through aerosol deposition. This problem is solved by forming an aerosol of a raw material liquid containing a film-forming material, and by supplying the generated aerosol to a substrate being vibrated at a frequency not higher than 10 kHz so as to form, on the substrate, a film including the film-forming material.
Inventors:
HASEGAWA MASATAKA (JP)
KANAZAWA HAYATO (JP)
KANAZAWA HAYATO (JP)
Application Number:
PCT/JP2018/045260
Publication Date:
June 27, 2019
Filing Date:
December 10, 2018
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B05D1/02; B05D3/00; B05D3/02; B05D3/06; B05D3/10; B05D3/12; C23C24/04; G02F1/13
Foreign References:
| JP2007027536A | 2007-02-01 | |||
| JP2004195340A | 2004-07-15 | |||
| JP2012216411A | 2012-11-08 | |||
| JP2009091604A | 2009-04-30 | |||
| JP2004046153A | 2004-02-12 | |||
| JP2003142398A | 2003-05-16 |
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
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