Title:
FILM FOR HOLDING GLASS SUBSTRATE AND METHOD FOR POLISHING GLASS SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2011/118010
Kind Code:
A1
Abstract:
Disclosed is a film for holding a glass substrate, wherein a self-sucking sheet is attached, via a double-coated adhesive sheet, to a back plate, and the glass substrate is sucked and held by the self-sucking sheet, characterized in that the double-coated adhesive sheet comprises multiple double-coated adhesive sheet pieces that are located in a single plane and these double-coated adhesive sheet pieces are attached, at definite intervals between adjacent pieces, to the self-sucking sheet and the back plate.
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Inventors:
YOKOTA Minoru (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
横田 稔 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
FURUTA Mitsuru (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
横田 稔 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
FURUTA Mitsuru (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
Application Number:
JP2010/055283
Publication Date:
September 29, 2011
Filing Date:
March 25, 2010
Export Citation:
Assignee:
Asahi Glass Company, Limited. (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 05, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区有楽町一丁目１２番１号 Tokyo, 〒1008405, JP)
FUJIBO HOLDINGS INC. (1-18-12, Ningyo-cho Nihombashi, Chuo-k, Tokyo 13, 〒1030013, JP)
富士紡ホールディングス株式会社 (〒13 東京都中央区日本橋人形町１丁目１８番１２号 Tokyo, 〒1030013, JP)
YOKOTA Minoru (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区有楽町一丁目１２番１号 Tokyo, 〒1008405, JP)
FUJIBO HOLDINGS INC. (1-18-12, Ningyo-cho Nihombashi, Chuo-k, Tokyo 13, 〒1030013, JP)
富士紡ホールディングス株式会社 (〒13 東京都中央区日本橋人形町１丁目１８番１２号 Tokyo, 〒1030013, JP)
YOKOTA Minoru (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
International Classes:
B24B37/04; H01L21/304
Attorney, Agent or Firm:
OGURI Shohei et al. (Eikoh Patent Firm, Toranomon East Bldg. 10F7-13, Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, 〒1050003, JP)
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Claims:
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