Title:
FILM PROCESSING UNIT AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/082064
Kind Code:
A1
Abstract:
A film processing unit, wherein: a nozzle is housed inside a nozzle housing hole of a standby pot; in this state, a cleaning solution is discharged from a plurality of discharge ports onto the outer-peripheral surface of the nozzle; as a result, a coating fluid adhered to the nozzle, a solidified product thereof, and the like are dissolved and removed from the nozzle; next, a metal-removing solution is discharged from the plurality of discharge ports onto the outer-circumferential surface of the nozzle; as a result, a metal component remaining on the nozzle is dissolved and removed from the nozzle; and in addition, purified water is discharged from the plurality of discharge ports onto the outer-peripheral surface of the nozzle, and any of the metal-removing solution adhered to the nozzle is washed away.
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Inventors:
TANAKA YUJI (JP)
ASAI MASAYA (JP)
HARUMOTO MASAHIKO (JP)
KANEYAMA KOJI (JP)
ASAI MASAYA (JP)
HARUMOTO MASAHIKO (JP)
KANEYAMA KOJI (JP)
Application Number:
PCT/JP2016/081847
Publication Date:
May 18, 2017
Filing Date:
October 27, 2016
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/027; B05C5/00; B05C11/10; H01L21/304
Foreign References:
| JP2003178965A | 2003-06-27 | |||
| JP2004296991A | 2004-10-21 | |||
| JP2013076973A | 2013-04-25 | |||
| JP2010062352A | 2010-03-18 | |||
| JP2009158924A | 2009-07-16 | |||
| JP2000338684A | 2000-12-08 | |||
| JPH1187292A | 1999-03-30 | |||
| JP2007318016A | 2007-12-06 | |||
| JP2001319910A | 2001-11-16 | |||
| JP2009126940A | 2009-06-11 | |||
| JP2008270509A | 2008-11-06 |
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
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