Title:
FILM STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/221649
Kind Code:
A1
Abstract:
A film structure (10), having: a substrate (11); a piezoelectric film (14) which is formed on the substrate (11) and which includes a first composite oxide represented by the composition formula Pb(Zr1-xTix)O3; and a piezoelectric film (15) which is formed on the piezoelectric film (14) and which includes a second composite oxide represented by the composition formula Pb(Zr1-yTiy)O3. x satisfies 0.10 < x ≤ 0.20, y satisfies 0.35 ≤ y ≤ 0.55, the piezoelectric film (14) has tensile stress, and the piezoelectric film (15) has compressive stress.
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Inventors:
KIJIMA TAKESHI (JP)
Application Number:
PCT/JP2017/020209
Publication Date:
December 28, 2017
Filing Date:
May 31, 2017
Export Citation:
Assignee:
YOUTEC CO LTD (JP)
International Classes:
H01L41/187; C23C14/08; H01L21/316; H01L41/316; H01L41/317; H01L41/43
Foreign References:
| JP2008042069A | 2008-02-21 | |||
| JP2006269916A | 2006-10-05 | |||
| JP2007335779A | 2007-12-27 |
Attorney, Agent or Firm:
HIGUCHI Takamitsu (JP)
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