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Title:
FILM-TYPE SURFACE-STRESS SENSOR AND METHOD FOR MANUFACTURING FILM-TYPE SURFACE-STRESS SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/281674
Kind Code:
A1
Abstract:
Provided is a film-type surface-stress sensor having insulation between circuitry.　A film-type surface-stress sensor 1 according to this invention comprises a film 13 and a sensor substrate 10. The film 13 deforms in response to surface stress. The sensor substrate 10 comprises a support region 15 and a circuit 12A. The support region 15 supports the film 13 and comprises a piezoresistive element 14. The piezoresistive element 14 detects the deformation of the film 13. The circuit 12A is connected to the piezoresistive element 14. The circuit 12A includes metal that can be made to form an oxide film through oxidation treatment. The circuit 12A has an oxide film layer 122 on the surface thereof.

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Inventors:
MIYAZAKI KENJI (JP)
HAGIWARA HISASHI (JP)
Application Number:
PCT/JP2021/025694
Publication Date:
January 12, 2023
Filing Date:
July 07, 2021
Export Citation:
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Assignee:
NEC CORP (JP)
International Classes:
G01N5/02; G01N19/00
Domestic Patent References:
WO2011148774A12011-12-01
WO2020179400A12020-09-10
WO2020218086A12020-10-29
WO2021006003A12021-01-14
WO2019182103A12019-09-26
WO2014024598A12014-02-13
WO2002004935A12002-01-17
Foreign References:
JP2016045032A2016-04-04
JP2002296228A2002-10-09
Other References:
NISHIKAWA MICHIHIRO, MURATA TOMOHIRO, ISHIHARA SHINSUKE, SHIBA KOTA, SHRESTHA LOK KUMAR, YOSHIKAWA GENKI, MINAMI KOSUKE, ARIGA KAT: "Discrimination of Methanol from Ethanol in Gasoline Using a Membrane-type Surface Stress Sensor Coated with Copper(I) Complex", BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, CHEMICAL SOCIETY OF JAPAN,NIPPON KAGAKUKAI, JP, vol. 94, no. 2, 15 February 2021 (2021-02-15), JP , pages 648 - 654, XP093022857, ISSN: 0009-2673, DOI: 10.1246/bcsj.20200347
Attorney, Agent or Firm:
TSUJIMARU Koichiro et al. (JP)
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