Title:
FILTER, FILTER MANUFACTURING METHOD, FILTERING DEVICE, CHEMICAL SOLUTION MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/009207
Kind Code:
A1
Abstract:
The present invention provides a filter wherein it is possible to manufacture a chemical solution that is excellent in preventing defects. In addition, a filter manufacturing method, a filtering device, and a chemical solution manufacturing method are provided. The filter according to the present invention is used for filtering and contains a filter body and at least type of one organic compound selected from the group consisting of: compounds represented by general formulas (I) to (V); alkanes represented by general formula (X); and alkenes represented by general formulas (XI) and (XII). The total content of the first organic compound is 0.10 to 10,000 ppt by mass with respect to the mass of the filter.
Inventors:
KAMIMURA TETSUYA (JP)
Application Number:
PCT/JP2019/026728
Publication Date:
January 09, 2020
Filing Date:
July 04, 2019
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B01D67/00; B01D61/58; B01D65/06; B01D69/04; B01D71/06; B01D71/26; B01D71/36; B01D71/56; G03F7/32
Domestic Patent References:
| WO2017155026A1 | 2017-09-14 |
Foreign References:
| JP2014219506A | 2014-11-20 | |||
| JP2010058062A | 2010-03-18 | |||
| JPS61149218A | 1986-07-07 | |||
| JP2016201426A | 2016-12-01 | |||
| JP2016073922A | 2016-05-12 |
Attorney, Agent or Firm:
ITOH Hideaki et al. (JP)
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