Title:
FILTER, METHOD FOR PRODUCING SAME, DRY ETCHING APPARATUS AND DRY ETCHING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/169809
Kind Code:
A1
Abstract:
The present invention relates to a filter which is capable of suppressing decomposition of a fluorinated saturated hydrocarbon when a composition that contains the fluorinated saturated hydrocarbon at a high concentration is filtered even if at least a part of a filter portion which comes into contact with an object to be filtered is formed of a metal or a metal compound. A filter according to the present invention is provided with: a portion which is formed of a metal or a metal compound and comes into contact with an object to be filtered; and an amine compound which is adsorbed on the surface of the portion. Meanwhile, a method for producing a filter according to the present invention comprises a step wherein an amine compound is brought into contact with the surface of a portion which is formed of a metal or a metal compound and comes into contact with an object to be filtered.
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Inventors:
HYAKUTAKE MUNEHIRO (JP)
HIRANO TAKAAKI (JP)
HIRANO TAKAAKI (JP)
Application Number:
PCT/JP2017/010525
Publication Date:
October 05, 2017
Filing Date:
March 15, 2017
Export Citation:
Assignee:
ZEON CORP (JP)
International Classes:
B01D39/14; C07C17/42; C07C19/08
Domestic Patent References:
| WO1994011329A1 | 1994-05-26 | |||
| WO2014136877A1 | 2014-09-12 |
Foreign References:
| JP2001314716A | 2001-11-13 | |||
| JPS59137427A | 1984-08-07 |
Other References:
See also references of EP 3437709A4
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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