Title:
FILTER UNIT AND PREPARATION METHOD THEREFOR, AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/016095
Kind Code:
A1
Abstract:
The present application relates to the technical field of radio frequency micro-electro-mechanical systems. Provided are a filter unit and a preparation method therefor, and an electronic apparatus. The filter unit comprises: a resonant structure; and a substrate, which is arranged on one side of the resonant structure, wherein the substrate comprises a modified structure and a supporting structure surrounding the modified structure, and a cavity is formed between the modified structure and the resonant structure. In the filter unit provided by the present application, the cavity is formed between the modified structure and the resonant structure, thereby greatly simplifying the process preparation flow, and reducing the process difficulty.
Inventors:
WEI QIUXU (CN)
LI YUE (CN)
WANG LIHUI (CN)
REN YANFEI (CN)
ZHANG TAONAN (CN)
XIAO YUELEI (CN)
WU YIFAN (CN)
FENG YULIN (CN)
CAO XUE (CN)
HAN KIDONG (CN)
AN QICHANG (CN)
CHANG WENBO (CN)
LI HUIYING (CN)
QU FENG (CN)
LI YUE (CN)
WANG LIHUI (CN)
REN YANFEI (CN)
ZHANG TAONAN (CN)
XIAO YUELEI (CN)
WU YIFAN (CN)
FENG YULIN (CN)
CAO XUE (CN)
HAN KIDONG (CN)
AN QICHANG (CN)
CHANG WENBO (CN)
LI HUIYING (CN)
QU FENG (CN)
Application Number:
PCT/CN2022/106158
Publication Date:
January 25, 2024
Filing Date:
July 18, 2022
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
H03H9/02; H03H3/02
Foreign References:
| CN112039460A | 2020-12-04 | |||
| CN105428218A | 2016-03-23 | |||
| CN106365109A | 2017-02-01 | |||
| CN114256273A | 2022-03-29 |
Attorney, Agent or Firm:
BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)
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